JPH0226774B2 - - Google Patents

Info

Publication number
JPH0226774B2
JPH0226774B2 JP5541583A JP5541583A JPH0226774B2 JP H0226774 B2 JPH0226774 B2 JP H0226774B2 JP 5541583 A JP5541583 A JP 5541583A JP 5541583 A JP5541583 A JP 5541583A JP H0226774 B2 JPH0226774 B2 JP H0226774B2
Authority
JP
Japan
Prior art keywords
substrate
magnetic
plane
film
magnetic film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5541583A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59181524A (ja
Inventor
Masaki Shinohara
Keiji Shono
Masahiro Myazaki
Hiroaki Wakamatsu
Katsuhiko Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5541583A priority Critical patent/JPS59181524A/ja
Publication of JPS59181524A publication Critical patent/JPS59181524A/ja
Publication of JPH0226774B2 publication Critical patent/JPH0226774B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP5541583A 1983-03-31 1983-03-31 基板上に形成された磁性膜とその製造方法 Granted JPS59181524A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5541583A JPS59181524A (ja) 1983-03-31 1983-03-31 基板上に形成された磁性膜とその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5541583A JPS59181524A (ja) 1983-03-31 1983-03-31 基板上に形成された磁性膜とその製造方法

Publications (2)

Publication Number Publication Date
JPS59181524A JPS59181524A (ja) 1984-10-16
JPH0226774B2 true JPH0226774B2 (enExample) 1990-06-12

Family

ID=12997932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5541583A Granted JPS59181524A (ja) 1983-03-31 1983-03-31 基板上に形成された磁性膜とその製造方法

Country Status (1)

Country Link
JP (1) JPS59181524A (enExample)

Also Published As

Publication number Publication date
JPS59181524A (ja) 1984-10-16

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