JPS59181031A - 空中配線の形成方法 - Google Patents

空中配線の形成方法

Info

Publication number
JPS59181031A
JPS59181031A JP5629883A JP5629883A JPS59181031A JP S59181031 A JPS59181031 A JP S59181031A JP 5629883 A JP5629883 A JP 5629883A JP 5629883 A JP5629883 A JP 5629883A JP S59181031 A JPS59181031 A JP S59181031A
Authority
JP
Japan
Prior art keywords
film
forming
resist film
insulating film
aerial wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5629883A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0223029B2 (enExample
Inventor
Osamu Akanuma
赤沼　収
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5629883A priority Critical patent/JPS59181031A/ja
Publication of JPS59181031A publication Critical patent/JPS59181031A/ja
Publication of JPH0223029B2 publication Critical patent/JPH0223029B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP5629883A 1983-03-30 1983-03-30 空中配線の形成方法 Granted JPS59181031A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5629883A JPS59181031A (ja) 1983-03-30 1983-03-30 空中配線の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5629883A JPS59181031A (ja) 1983-03-30 1983-03-30 空中配線の形成方法

Publications (2)

Publication Number Publication Date
JPS59181031A true JPS59181031A (ja) 1984-10-15
JPH0223029B2 JPH0223029B2 (enExample) 1990-05-22

Family

ID=13023209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5629883A Granted JPS59181031A (ja) 1983-03-30 1983-03-30 空中配線の形成方法

Country Status (1)

Country Link
JP (1) JPS59181031A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6376458A (ja) * 1986-09-19 1988-04-06 Nec Corp 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6376458A (ja) * 1986-09-19 1988-04-06 Nec Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0223029B2 (enExample) 1990-05-22

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