JPS59180346A - 表面検査装置 - Google Patents

表面検査装置

Info

Publication number
JPS59180346A
JPS59180346A JP5393283A JP5393283A JPS59180346A JP S59180346 A JPS59180346 A JP S59180346A JP 5393283 A JP5393283 A JP 5393283A JP 5393283 A JP5393283 A JP 5393283A JP S59180346 A JPS59180346 A JP S59180346A
Authority
JP
Japan
Prior art keywords
circuit
flaw
representative
signal
histogram
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5393283A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0450528B2 (enExample
Inventor
Chiaki Fukazawa
深沢　千秋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP5393283A priority Critical patent/JPS59180346A/ja
Publication of JPS59180346A publication Critical patent/JPS59180346A/ja
Publication of JPH0450528B2 publication Critical patent/JPH0450528B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP5393283A 1983-03-31 1983-03-31 表面検査装置 Granted JPS59180346A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5393283A JPS59180346A (ja) 1983-03-31 1983-03-31 表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5393283A JPS59180346A (ja) 1983-03-31 1983-03-31 表面検査装置

Publications (2)

Publication Number Publication Date
JPS59180346A true JPS59180346A (ja) 1984-10-13
JPH0450528B2 JPH0450528B2 (enExample) 1992-08-14

Family

ID=12956505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5393283A Granted JPS59180346A (ja) 1983-03-31 1983-03-31 表面検査装置

Country Status (1)

Country Link
JP (1) JPS59180346A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62209306A (ja) * 1986-03-10 1987-09-14 Agency Of Ind Science & Technol 撮像式塗装下地処理面グレ−ド判定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62209306A (ja) * 1986-03-10 1987-09-14 Agency Of Ind Science & Technol 撮像式塗装下地処理面グレ−ド判定装置

Also Published As

Publication number Publication date
JPH0450528B2 (enExample) 1992-08-14

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