JPS59178898U - プラズマ発生装置 - Google Patents

プラズマ発生装置

Info

Publication number
JPS59178898U
JPS59178898U JP7272483U JP7272483U JPS59178898U JP S59178898 U JPS59178898 U JP S59178898U JP 7272483 U JP7272483 U JP 7272483U JP 7272483 U JP7272483 U JP 7272483U JP S59178898 U JPS59178898 U JP S59178898U
Authority
JP
Japan
Prior art keywords
exhaust chamber
plasma
plate
generated
plasma generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7272483U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0241168Y2 (enExample
Inventor
洋司 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP7272483U priority Critical patent/JPS59178898U/ja
Publication of JPS59178898U publication Critical patent/JPS59178898U/ja
Application granted granted Critical
Publication of JPH0241168Y2 publication Critical patent/JPH0241168Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Physical Vapour Deposition (AREA)
JP7272483U 1983-05-16 1983-05-16 プラズマ発生装置 Granted JPS59178898U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7272483U JPS59178898U (ja) 1983-05-16 1983-05-16 プラズマ発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7272483U JPS59178898U (ja) 1983-05-16 1983-05-16 プラズマ発生装置

Publications (2)

Publication Number Publication Date
JPS59178898U true JPS59178898U (ja) 1984-11-29
JPH0241168Y2 JPH0241168Y2 (enExample) 1990-11-01

Family

ID=30202858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7272483U Granted JPS59178898U (ja) 1983-05-16 1983-05-16 プラズマ発生装置

Country Status (1)

Country Link
JP (1) JPS59178898U (enExample)

Also Published As

Publication number Publication date
JPH0241168Y2 (enExample) 1990-11-01

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