JPS59163707A - 透明導電膜 - Google Patents
透明導電膜Info
- Publication number
- JPS59163707A JPS59163707A JP3791583A JP3791583A JPS59163707A JP S59163707 A JPS59163707 A JP S59163707A JP 3791583 A JP3791583 A JP 3791583A JP 3791583 A JP3791583 A JP 3791583A JP S59163707 A JPS59163707 A JP S59163707A
- Authority
- JP
- Japan
- Prior art keywords
- oxide
- transparent conductive
- conductive film
- indium
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910003437 indium oxide Inorganic materials 0.000 claims description 11
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 11
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 10
- 229910001887 tin oxide Inorganic materials 0.000 claims description 10
- 229910000464 lead oxide Inorganic materials 0.000 claims description 8
- 229910001925 ruthenium oxide Inorganic materials 0.000 claims description 8
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 claims description 8
- 229910000831 Steel Inorganic materials 0.000 claims description 4
- 239000010959 steel Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 claims 1
- HTUMBQDCCIXGCV-UHFFFAOYSA-N lead oxide Chemical compound [O-2].[Pb+2] HTUMBQDCCIXGCV-UHFFFAOYSA-N 0.000 description 8
- 238000007740 vapor deposition Methods 0.000 description 5
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 4
- 239000005751 Copper oxide Substances 0.000 description 4
- 229910000431 copper oxide Inorganic materials 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- WMWLMWRWZQELOS-UHFFFAOYSA-N bismuth(iii) oxide Chemical compound O=[Bi]O[Bi]=O WMWLMWRWZQELOS-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
Landscapes
- Non-Insulated Conductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3791583A JPS59163707A (ja) | 1983-03-08 | 1983-03-08 | 透明導電膜 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3791583A JPS59163707A (ja) | 1983-03-08 | 1983-03-08 | 透明導電膜 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59163707A true JPS59163707A (ja) | 1984-09-14 |
| JPH0346928B2 JPH0346928B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-07-17 |
Family
ID=12510836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3791583A Granted JPS59163707A (ja) | 1983-03-08 | 1983-03-08 | 透明導電膜 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59163707A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5045235A (en) * | 1989-05-24 | 1991-09-03 | Showa Denko K.K. | Transparent conductive film |
| US5320913A (en) * | 1992-01-24 | 1994-06-14 | Asahi Glass Company Ltd. | Conductive film and low reflection conductive film, and processes for their production |
| EP1033355A4 (en) * | 1998-08-31 | 2010-12-01 | Idemitsu Kosan Co | TARGET FOR TRANSPARENT ELECTROCONDUCTIVE FILM, TRANSPARENT ELECTROCONDUCTIVE MATERIAL, TRANSPARENT ELECTROCONDUCTIVE GLASS AND TRANSPARENT ELECTROCONDUCTIVE FILM |
| WO2011108536A1 (ja) * | 2010-03-03 | 2011-09-09 | 三井金属鉱業株式会社 | 酸化アルミニウム－酸化亜鉛系スパッタリングターゲット |
-
1983
- 1983-03-08 JP JP3791583A patent/JPS59163707A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5045235A (en) * | 1989-05-24 | 1991-09-03 | Showa Denko K.K. | Transparent conductive film |
| US5320913A (en) * | 1992-01-24 | 1994-06-14 | Asahi Glass Company Ltd. | Conductive film and low reflection conductive film, and processes for their production |
| EP1033355A4 (en) * | 1998-08-31 | 2010-12-01 | Idemitsu Kosan Co | TARGET FOR TRANSPARENT ELECTROCONDUCTIVE FILM, TRANSPARENT ELECTROCONDUCTIVE MATERIAL, TRANSPARENT ELECTROCONDUCTIVE GLASS AND TRANSPARENT ELECTROCONDUCTIVE FILM |
| WO2011108536A1 (ja) * | 2010-03-03 | 2011-09-09 | 三井金属鉱業株式会社 | 酸化アルミニウム－酸化亜鉛系スパッタリングターゲット |
| WO2011108535A1 (ja) * | 2010-03-03 | 2011-09-09 | 三井金属鉱業株式会社 | 酸化ガリウム－酸化亜鉛系スパッタリングターゲット |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0346928B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-07-17 |
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