JPS59157942A - 電子顕微鏡 - Google Patents

電子顕微鏡

Info

Publication number
JPS59157942A
JPS59157942A JP58031273A JP3127383A JPS59157942A JP S59157942 A JPS59157942 A JP S59157942A JP 58031273 A JP58031273 A JP 58031273A JP 3127383 A JP3127383 A JP 3127383A JP S59157942 A JPS59157942 A JP S59157942A
Authority
JP
Japan
Prior art keywords
signal
field
observation mode
deflection
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58031273A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0313701B2 (enrdf_load_stackoverflow
Inventor
Kenji Obara
健二 小原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP58031273A priority Critical patent/JPS59157942A/ja
Publication of JPS59157942A publication Critical patent/JPS59157942A/ja
Publication of JPH0313701B2 publication Critical patent/JPH0313701B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP58031273A 1983-02-25 1983-02-25 電子顕微鏡 Granted JPS59157942A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58031273A JPS59157942A (ja) 1983-02-25 1983-02-25 電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58031273A JPS59157942A (ja) 1983-02-25 1983-02-25 電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS59157942A true JPS59157942A (ja) 1984-09-07
JPH0313701B2 JPH0313701B2 (enrdf_load_stackoverflow) 1991-02-25

Family

ID=12326720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58031273A Granted JPS59157942A (ja) 1983-02-25 1983-02-25 電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS59157942A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5576560A (en) * 1978-12-01 1980-06-09 Hitachi Ltd Observation field moving device for electron microscope
JPS56141357U (enrdf_load_stackoverflow) * 1980-03-26 1981-10-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5576560A (en) * 1978-12-01 1980-06-09 Hitachi Ltd Observation field moving device for electron microscope
JPS56141357U (enrdf_load_stackoverflow) * 1980-03-26 1981-10-26

Also Published As

Publication number Publication date
JPH0313701B2 (enrdf_load_stackoverflow) 1991-02-25

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