JPS5913617A - 微結晶シリコンを含むシリコン薄膜の製造法 - Google Patents

微結晶シリコンを含むシリコン薄膜の製造法

Info

Publication number
JPS5913617A
JPS5913617A JP12289482A JP12289482A JPS5913617A JP S5913617 A JPS5913617 A JP S5913617A JP 12289482 A JP12289482 A JP 12289482A JP 12289482 A JP12289482 A JP 12289482A JP S5913617 A JPS5913617 A JP S5913617A
Authority
JP
Japan
Prior art keywords
thin film
silicon thin
silicon
bias voltage
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12289482A
Other languages
English (en)
Japanese (ja)
Other versions
JPS639014B2 (enExample
Inventor
Kazunobu Tanaka
田中　一宜
Akihisa Matsuda
彰久 松田
Keiji Kumagai
熊谷　啓二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tonen General Sekiyu KK
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Toa Nenryo Kogyyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Toa Nenryo Kogyyo KK filed Critical Agency of Industrial Science and Technology
Priority to JP12289482A priority Critical patent/JPS5913617A/ja
Publication of JPS5913617A publication Critical patent/JPS5913617A/ja
Publication of JPS639014B2 publication Critical patent/JPS639014B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP12289482A 1982-07-16 1982-07-16 微結晶シリコンを含むシリコン薄膜の製造法 Granted JPS5913617A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12289482A JPS5913617A (ja) 1982-07-16 1982-07-16 微結晶シリコンを含むシリコン薄膜の製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12289482A JPS5913617A (ja) 1982-07-16 1982-07-16 微結晶シリコンを含むシリコン薄膜の製造法

Publications (2)

Publication Number Publication Date
JPS5913617A true JPS5913617A (ja) 1984-01-24
JPS639014B2 JPS639014B2 (enExample) 1988-02-25

Family

ID=14847260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12289482A Granted JPS5913617A (ja) 1982-07-16 1982-07-16 微結晶シリコンを含むシリコン薄膜の製造法

Country Status (1)

Country Link
JP (1) JPS5913617A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5997514A (ja) * 1982-11-22 1984-06-05 Agency Of Ind Science & Technol 太陽電池の製造法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5997514A (ja) * 1982-11-22 1984-06-05 Agency Of Ind Science & Technol 太陽電池の製造法

Also Published As

Publication number Publication date
JPS639014B2 (enExample) 1988-02-25

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