JPS59134870A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS59134870A
JPS59134870A JP58007236A JP723683A JPS59134870A JP S59134870 A JPS59134870 A JP S59134870A JP 58007236 A JP58007236 A JP 58007236A JP 723683 A JP723683 A JP 723683A JP S59134870 A JPS59134870 A JP S59134870A
Authority
JP
Japan
Prior art keywords
type
region
conductivity type
layer
semiconductor layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58007236A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0470781B2 (enrdf_load_stackoverflow
Inventor
Isao Shimizu
勲 志水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58007236A priority Critical patent/JPS59134870A/ja
Publication of JPS59134870A publication Critical patent/JPS59134870A/ja
Publication of JPH0470781B2 publication Critical patent/JPH0470781B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0112—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs
    • H10D84/0116—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs the components including integrated injection logic [I2L]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe

Landscapes

  • Element Separation (AREA)
  • Bipolar Integrated Circuits (AREA)
JP58007236A 1983-01-21 1983-01-21 半導体装置の製造方法 Granted JPS59134870A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58007236A JPS59134870A (ja) 1983-01-21 1983-01-21 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58007236A JPS59134870A (ja) 1983-01-21 1983-01-21 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS59134870A true JPS59134870A (ja) 1984-08-02
JPH0470781B2 JPH0470781B2 (enrdf_load_stackoverflow) 1992-11-11

Family

ID=11660357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58007236A Granted JPS59134870A (ja) 1983-01-21 1983-01-21 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS59134870A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5474367A (en) * 1977-11-26 1979-06-14 Fujitsu Ltd Manufacture of semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5474367A (en) * 1977-11-26 1979-06-14 Fujitsu Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPH0470781B2 (enrdf_load_stackoverflow) 1992-11-11

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