JPS59130418A - 加熱処理システム - Google Patents

加熱処理システム

Info

Publication number
JPS59130418A
JPS59130418A JP58005665A JP566583A JPS59130418A JP S59130418 A JPS59130418 A JP S59130418A JP 58005665 A JP58005665 A JP 58005665A JP 566583 A JP566583 A JP 566583A JP S59130418 A JPS59130418 A JP S59130418A
Authority
JP
Japan
Prior art keywords
caps
semiconductor substrate
heat treatment
tube
jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58005665A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0361336B2 (en:Method
Inventor
Keiji Watanabe
恵二 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP58005665A priority Critical patent/JPS59130418A/ja
Publication of JPS59130418A publication Critical patent/JPS59130418A/ja
Publication of JPH0361336B2 publication Critical patent/JPH0361336B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/0436—
JP58005665A 1983-01-17 1983-01-17 加熱処理システム Granted JPS59130418A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58005665A JPS59130418A (ja) 1983-01-17 1983-01-17 加熱処理システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58005665A JPS59130418A (ja) 1983-01-17 1983-01-17 加熱処理システム

Publications (2)

Publication Number Publication Date
JPS59130418A true JPS59130418A (ja) 1984-07-27
JPH0361336B2 JPH0361336B2 (en:Method) 1991-09-19

Family

ID=11617396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58005665A Granted JPS59130418A (ja) 1983-01-17 1983-01-17 加熱処理システム

Country Status (1)

Country Link
JP (1) JPS59130418A (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5007992A (en) * 1989-05-15 1991-04-16 Weber Daniel K Method and apparatus for removing oxygen from a semiconductor processing reactor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54184078U (en:Method) * 1978-06-19 1979-12-27
JPS5532096U (en:Method) * 1978-08-24 1980-03-01

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54184078U (en:Method) * 1978-06-19 1979-12-27
JPS5532096U (en:Method) * 1978-08-24 1980-03-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5007992A (en) * 1989-05-15 1991-04-16 Weber Daniel K Method and apparatus for removing oxygen from a semiconductor processing reactor

Also Published As

Publication number Publication date
JPH0361336B2 (en:Method) 1991-09-19

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