JPS59126661A - 薄膜抵抗体の製法 - Google Patents

薄膜抵抗体の製法

Info

Publication number
JPS59126661A
JPS59126661A JP138883A JP138883A JPS59126661A JP S59126661 A JPS59126661 A JP S59126661A JP 138883 A JP138883 A JP 138883A JP 138883 A JP138883 A JP 138883A JP S59126661 A JPS59126661 A JP S59126661A
Authority
JP
Japan
Prior art keywords
thin film
resistor
surface portion
manufacturing
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP138883A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0118585B2 (OSRAM
Inventor
Yoshihito Amamiya
好仁 雨宮
Katsumi Murase
村瀬　克実
Toshiro Ogino
俊郎 荻野
Masahiro Sakagami
坂上　正裕
Yoshihiko Mizushima
宜彦 水島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP138883A priority Critical patent/JPS59126661A/ja
Publication of JPS59126661A publication Critical patent/JPS59126661A/ja
Publication of JPH0118585B2 publication Critical patent/JPH0118585B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP138883A 1983-01-08 1983-01-08 薄膜抵抗体の製法 Granted JPS59126661A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP138883A JPS59126661A (ja) 1983-01-08 1983-01-08 薄膜抵抗体の製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP138883A JPS59126661A (ja) 1983-01-08 1983-01-08 薄膜抵抗体の製法

Publications (2)

Publication Number Publication Date
JPS59126661A true JPS59126661A (ja) 1984-07-21
JPH0118585B2 JPH0118585B2 (OSRAM) 1989-04-06

Family

ID=11500099

Family Applications (1)

Application Number Title Priority Date Filing Date
JP138883A Granted JPS59126661A (ja) 1983-01-08 1983-01-08 薄膜抵抗体の製法

Country Status (1)

Country Link
JP (1) JPS59126661A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990007790A1 (fr) * 1988-12-28 1990-07-12 Oki Electric Industry Co., Ltd. Procede de formation de motifs
JPH05259290A (ja) * 1991-12-30 1993-10-08 Philips Gloeilampenfab:Nv 半導体デバイスの製造方法およびヒューズ構造体

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990007790A1 (fr) * 1988-12-28 1990-07-12 Oki Electric Industry Co., Ltd. Procede de formation de motifs
US5074956A (en) * 1988-12-28 1991-12-24 Oki Electric Industry Co., Ltd. Pattern forming method
JPH05259290A (ja) * 1991-12-30 1993-10-08 Philips Gloeilampenfab:Nv 半導体デバイスの製造方法およびヒューズ構造体

Also Published As

Publication number Publication date
JPH0118585B2 (OSRAM) 1989-04-06

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