JPS59112638A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS59112638A
JPS59112638A JP57222465A JP22246582A JPS59112638A JP S59112638 A JPS59112638 A JP S59112638A JP 57222465 A JP57222465 A JP 57222465A JP 22246582 A JP22246582 A JP 22246582A JP S59112638 A JPS59112638 A JP S59112638A
Authority
JP
Japan
Prior art keywords
pad
diffusion
bonding
metal
bonding pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57222465A
Other languages
English (en)
Inventor
Seiichiro Yokokura
横倉　誠一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP57222465A priority Critical patent/JPS59112638A/ja
Publication of JPS59112638A publication Critical patent/JPS59112638A/ja
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02—Bonding areas ; Manufacturing methods related thereto
    • H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/04042—Bonding areas specifically adapted for wire connectors, e.g. wirebond pads
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/05001—Internal layers
    • H01L2224/05073—Single internal layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554—External layer
    • H01L2224/0555—Shape
    • H01L2224/05552—Shape in top view
    • H01L2224/05554—Shape in top view being square
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554—External layer
    • H01L2224/0555—Shape
    • H01L2224/05556—Shape in side view
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554—External layer
    • H01L2224/05599—Material
    • H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/05617—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
    • H01L2224/05624—Aluminium [Al] as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484—Connecting portions
    • H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01013—Aluminum [Al]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01082—Lead [Pb]

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Wire Bonding (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 〔発明の技術分野〕 この発明は半導体集積回路内に用いられるポンディング
パッド周辺の金属腐食による回向３を防止することがで
きる半導体装置に関する。
〔発明の技術的背景〕
第１図は従来のボンディング・Ｏラド及びその周辺部を
示す平面図である。同図において、１１は図示していな
い半導体素子の電極に通じている拡散によシ形成された
配線、りまシ拡散配線である。そして、上記拡散配線１
１は蒸着により形成されたアルミニウムよりなる金属配
線１２によυ上記金属配線１２と同じようにアルミニウ
ムを蒸着することにより得られたボンディンダノｅッド
１３に導ひかれている。上記金属配線１２は・ぐッシベ
ーション膜１４により保獲されているもので、上記パッ
シベーション膜１４の開口部１５に上記ポンプイングツ
ぞラド１３が位置するように構成されている。そして、
上記ポンディングパッド１３にボンディングワイヤがボ
ンディングされてインナーリード（図示せず）との電気
的接続がなされる。
〔背景技術の問題点〕
しかし、第１図に示すようなポンディングパッド及びそ
の周辺部を有する半導体集積回路が多湿状態において使
用された場合には、・ぐッシベーション膜１４により保
穫されていない部分つまシ開ロ部１５内に露出したポン
ディングパッド１３と金属配線１２の間に断勝が生じて
しまうという欠点があった。このような断線の一例を第
３図体）に示しておく。つまシ、第３図体）に示すよう
に、金属配線１２の開口部１５に露出した部分ノロは腐
食し、第１図に示したぎンディングパッド１３は腐食し
て図番１７で示すようなポンディングパッド１７となる
。゛このようにして、金」４配線１２とポンディングパ
ッドＪ７とは完全に電気的接続を断たれてしまうことに
なる。
〔発明の目的〕
この発明は上記の点に鑑みてなされたもので、その目的
は半導体集積回路のパッシベーション膜に覆われていな
い開口部における金属配線とボンディング・ぐラドとの
断線を防止するようにした半導体装置を提供することに
ある。
〔発明・の概要〕
半導体集積回路の・′Ｐ７シペーシヨン膜に覆われてい
ない開口部に半導体素子の電極に通じている拡散により
形成された拡散配線を導いて、拡散層よりなるボンディ
ングパッドを形成し、この拡散層よりなるポンディング
パッド上にアルミニウムを蒸着することにより形成され
た金属のビンディングパッドを形成している。
〔発明の実施例〕
以下、図面を参照してこの発明の一実施例を説明する。
第２図において、２１は図示していない半導体素子の電
極に通じている拡散によ多形成された配線、つまシ拡散
配線である。また、パッシベーション膜２２の開口部２
３には上記拡散配線２１と同一拡散工程により形成され
たポンディングパッド２４が形成される。さらに、上記
ボンディングｉ４　ラド２４上に蒸着によシアルミニウ
ムよシなる金属のポンディングパッド２５が形成される
。そして、上記ポンプイングツぐラド２５にボンディン
グワイヤがボンディングされてインナーリード（図示せ
ず）との電気的接続がなされる。
箱２図（Ｂ）は第２図体）の断面図を衣わしている。
ここで、２０は半導体基板である。第２図（Ｂ）に示す
ようにポンプイングツ９ツド２５上にボンディングワイ
ヤ２６がボンディングされている。
しかして、第２図に示したようなボンディングパッド及
びその周辺部を有する半導体集積回路が多湿状態におい
て使用された場合には、パッシベーション膜２２によシ
保護されていない部分、つまり、金へのポンディングパ
ッド２５は周囲より腐食して、第３図（Ｂ）の図番２７
で示すようなポンディングパッドとなる。しかし、この
ように変形したビンディングパッド２７の下には拡散に
よ多形成されたボンディングバンド２４が形成されてお
シ、このポンディングパッド２４と拡散配線２１とが電
気的に接続されているため金属のパ？ンディングパッド
２５が図番２７で示されるようになっても断線は生じな
い。
〔発明の効果〕
以上詳述したようにこの発明によれば、金属のｓｆシン
ディングパッド下拡散により形成されたポンディングパ
ッドを設け、このｔム散によシ形Ｍ、　サ：ｈ−たポン
ディングパッドとパッシベーション膜下に設けられた拡
散配線とを一体形成しておくことによシ、上記金属のポ
ンディングパッドが腐食されても、上記拡散配線との電
気的接続は拡散によ多形成されたボンディングバンドを
介し０行なわれるため、断線の発生を防止させることが
できる。
【図面の簡単な説明】
第１図は従来のぎンディングパッド及びその周辺部を示
す図、第２図（Ａ）はこの発明の一実施例に係る半導体
装置を示す平面図、第２図（Ｂ）はその断面図、第３図
（Ａ）は従来の断線状態を示す図、第３図（Ｂ）はこの
発明に係る半導体装置に断線が発生した状態を示す図で
ある。 ２１・・・拡散配線、２２・・・パッシベーションＪＩ
Ｍ、２３・・・開口部、２４．２５・・・ポンディング
パッド。 出願人代理人　　弁理士　鈴　江　武　彦牙１図 牙２図 牙３図 （Ａ）　　　　　　　（Ｂ）　’ −１′

Claims (1)

    【特許請求の範囲】
  1. 金属のボン−ディングパッド下に拡散により形、成され
    たボンディング・９ノドを設け、上記拡散により形成さ
    れたポンディングパッドとパッンベーション膜下の拡散
    配線とを一体形成するようにしたことを特徴とする半導
    体装置。
JP57222465A 1982-12-18 1982-12-18 半導体装置 Pending JPS59112638A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57222465A JPS59112638A (ja) 1982-12-18 1982-12-18 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57222465A JPS59112638A (ja) 1982-12-18 1982-12-18 半導体装置

Publications (1)

Publication Number Publication Date
JPS59112638A true JPS59112638A (ja) 1984-06-29

Family

ID=16782837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57222465A Pending JPS59112638A (ja) 1982-12-18 1982-12-18 半導体装置

Country Status (1)

Country Link
JP (1) JPS59112638A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6677970B1 (en) * 1998-02-20 2004-01-13 Sanyo Electric Co., Ltd. Light-emitting diode array and optical print head

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6677970B1 (en) * 1998-02-20 2004-01-13 Sanyo Electric Co., Ltd. Light-emitting diode array and optical print head

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