JPS589944B2 - フオトマスク - Google Patents

フオトマスク

Info

Publication number
JPS589944B2
JPS589944B2 JP50014734A JP1473475A JPS589944B2 JP S589944 B2 JPS589944 B2 JP S589944B2 JP 50014734 A JP50014734 A JP 50014734A JP 1473475 A JP1473475 A JP 1473475A JP S589944 B2 JPS589944 B2 JP S589944B2
Authority
JP
Japan
Prior art keywords
photomask
photoresist
reference photomask
transparent substrate
photomasks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP50014734A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5195778A (enExample
Inventor
岩間郁夫
西岡久作
和田悟
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP50014734A priority Critical patent/JPS589944B2/ja
Publication of JPS5195778A publication Critical patent/JPS5195778A/ja
Publication of JPS589944B2 publication Critical patent/JPS589944B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP50014734A 1975-02-03 1975-02-03 フオトマスク Expired JPS589944B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50014734A JPS589944B2 (ja) 1975-02-03 1975-02-03 フオトマスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50014734A JPS589944B2 (ja) 1975-02-03 1975-02-03 フオトマスク

Publications (2)

Publication Number Publication Date
JPS5195778A JPS5195778A (enExample) 1976-08-21
JPS589944B2 true JPS589944B2 (ja) 1983-02-23

Family

ID=11869342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50014734A Expired JPS589944B2 (ja) 1975-02-03 1975-02-03 フオトマスク

Country Status (1)

Country Link
JP (1) JPS589944B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52160402U (enExample) * 1976-05-31 1977-12-06
JPS6019159B2 (ja) * 1976-12-18 1985-05-14 工業技術院長 磁気バブル素子製作用ホトマスク
JPS5735952U (enExample) * 1980-08-08 1982-02-25
JPH05142760A (ja) * 1991-11-25 1993-06-11 Sharp Corp フオトマスク

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50105073A (enExample) * 1974-01-22 1975-08-19

Also Published As

Publication number Publication date
JPS5195778A (enExample) 1976-08-21

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