JPS5890738A - 多層導体を有する素子 - Google Patents

多層導体を有する素子

Info

Publication number
JPS5890738A
JPS5890738A JP18880781A JP18880781A JPS5890738A JP S5890738 A JPS5890738 A JP S5890738A JP 18880781 A JP18880781 A JP 18880781A JP 18880781 A JP18880781 A JP 18880781A JP S5890738 A JPS5890738 A JP S5890738A
Authority
JP
Japan
Prior art keywords
layer
conductor
carbon layer
substrate
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18880781A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0261142B2 (enrdf_load_stackoverflow
Inventor
Hisanao Tsuge
久尚 柘植
Sotaro Edokoro
絵所　壮太郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP18880781A priority Critical patent/JPS5890738A/ja
Publication of JPS5890738A publication Critical patent/JPS5890738A/ja
Publication of JPH0261142B2 publication Critical patent/JPH0261142B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP18880781A 1981-11-25 1981-11-25 多層導体を有する素子 Granted JPS5890738A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18880781A JPS5890738A (ja) 1981-11-25 1981-11-25 多層導体を有する素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18880781A JPS5890738A (ja) 1981-11-25 1981-11-25 多層導体を有する素子

Publications (2)

Publication Number Publication Date
JPS5890738A true JPS5890738A (ja) 1983-05-30
JPH0261142B2 JPH0261142B2 (enrdf_load_stackoverflow) 1990-12-19

Family

ID=16230142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18880781A Granted JPS5890738A (ja) 1981-11-25 1981-11-25 多層導体を有する素子

Country Status (1)

Country Link
JP (1) JPS5890738A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0564435U (ja) * 1992-01-31 1993-08-27 スズキ株式会社 エンジン用ガバナーのガバナー軸取付け装置

Also Published As

Publication number Publication date
JPH0261142B2 (enrdf_load_stackoverflow) 1990-12-19

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