JPS5887884A - 酸化物超伝導体回路の電極形成方法 - Google Patents
酸化物超伝導体回路の電極形成方法Info
- Publication number
- JPS5887884A JPS5887884A JP56185330A JP18533081A JPS5887884A JP S5887884 A JPS5887884 A JP S5887884A JP 56185330 A JP56185330 A JP 56185330A JP 18533081 A JP18533081 A JP 18533081A JP S5887884 A JPS5887884 A JP S5887884A
- Authority
- JP
- Japan
- Prior art keywords
- gold
- electrode
- resist
- thin film
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002887 superconductor Substances 0.000 title claims abstract description 11
- 238000000034 method Methods 0.000 title claims description 10
- 239000010931 gold Substances 0.000 claims abstract description 29
- 229910052737 gold Inorganic materials 0.000 claims abstract description 29
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 26
- 239000010409 thin film Substances 0.000 claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 239000010408 film Substances 0.000 claims abstract description 14
- 238000005530 etching Methods 0.000 claims abstract description 9
- 230000008020 evaporation Effects 0.000 claims abstract 2
- 238000001704 evaporation Methods 0.000 claims abstract 2
- 238000000151 deposition Methods 0.000 claims description 7
- 239000007864 aqueous solution Substances 0.000 claims description 6
- 150000002343 gold Chemical class 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 abstract description 6
- 239000000203 mixture Substances 0.000 abstract description 2
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 230000002542 deteriorative effect Effects 0.000 abstract 1
- 238000000059 patterning Methods 0.000 abstract 1
- 229910016063 BaPb Inorganic materials 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0744—Manufacture or deposition of electrodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56185330A JPS5887884A (ja) | 1981-11-20 | 1981-11-20 | 酸化物超伝導体回路の電極形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56185330A JPS5887884A (ja) | 1981-11-20 | 1981-11-20 | 酸化物超伝導体回路の電極形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5887884A true JPS5887884A (ja) | 1983-05-25 |
| JPS6317348B2 JPS6317348B2 (enrdf_load_stackoverflow) | 1988-04-13 |
Family
ID=16168927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56185330A Granted JPS5887884A (ja) | 1981-11-20 | 1981-11-20 | 酸化物超伝導体回路の電極形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5887884A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4566499A (en) * | 1983-11-24 | 1986-01-28 | Mitsubishi Rayon Co., Ltd. | Jacquard mechanism |
| JPH0294675A (ja) * | 1988-09-30 | 1990-04-05 | Osaka Prefecture | 酸化物超伝導体の電極形成方法 |
| JPH02116180A (ja) * | 1988-10-26 | 1990-04-27 | Osaka Prefecture | 酸化物超伝導体の電極形成方法 |
| US5015620A (en) * | 1987-11-06 | 1991-05-14 | The United States Of America As Represented By The Secretary Of Commerce | High-Tc superconductor contact unit having low interface resistivity, and method of making |
-
1981
- 1981-11-20 JP JP56185330A patent/JPS5887884A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4566499A (en) * | 1983-11-24 | 1986-01-28 | Mitsubishi Rayon Co., Ltd. | Jacquard mechanism |
| US5015620A (en) * | 1987-11-06 | 1991-05-14 | The United States Of America As Represented By The Secretary Of Commerce | High-Tc superconductor contact unit having low interface resistivity, and method of making |
| JPH0294675A (ja) * | 1988-09-30 | 1990-04-05 | Osaka Prefecture | 酸化物超伝導体の電極形成方法 |
| JPH02116180A (ja) * | 1988-10-26 | 1990-04-27 | Osaka Prefecture | 酸化物超伝導体の電極形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6317348B2 (enrdf_load_stackoverflow) | 1988-04-13 |
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