JPS5885523A - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JPS5885523A
JPS5885523A JP56185081A JP18508181A JPS5885523A JP S5885523 A JPS5885523 A JP S5885523A JP 56185081 A JP56185081 A JP 56185081A JP 18508181 A JP18508181 A JP 18508181A JP S5885523 A JPS5885523 A JP S5885523A
Authority
JP
Japan
Prior art keywords
gas
protrusions
boat
core tube
longitudinal direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56185081A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0151051B2 (enExample
Inventor
Iwao Matsushima
松島　巖
Junichi Takahara
純一 高原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP56185081A priority Critical patent/JPS5885523A/ja
Publication of JPS5885523A publication Critical patent/JPS5885523A/ja
Publication of JPH0151051B2 publication Critical patent/JPH0151051B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P32/00—
JP56185081A 1981-11-17 1981-11-17 半導体製造装置 Granted JPS5885523A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56185081A JPS5885523A (ja) 1981-11-17 1981-11-17 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56185081A JPS5885523A (ja) 1981-11-17 1981-11-17 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS5885523A true JPS5885523A (ja) 1983-05-21
JPH0151051B2 JPH0151051B2 (enExample) 1989-11-01

Family

ID=16164483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56185081A Granted JPS5885523A (ja) 1981-11-17 1981-11-17 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS5885523A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09320973A (ja) * 1996-05-30 1997-12-12 Nec Yamagata Ltd ウェハ搬出入装置
JP2012009641A (ja) * 2010-06-25 2012-01-12 Koyo Thermo System Kk 連続拡散処理装置
JP2012009638A (ja) * 2010-06-25 2012-01-12 Koyo Thermo System Kk 連続拡散処理装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5242075A (en) * 1975-09-29 1977-04-01 Nippon Denso Co Ltd Device for controlling gas atmosphere in semiconductor producing equip ment
JPS53129964A (en) * 1977-04-20 1978-11-13 Hitachi Ltd Method and device for inserting and taking out of heat treatment jig
JPS5469384A (en) * 1977-11-14 1979-06-04 Matsushita Electric Ind Co Ltd Electric furnace unit

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5242075A (en) * 1975-09-29 1977-04-01 Nippon Denso Co Ltd Device for controlling gas atmosphere in semiconductor producing equip ment
JPS53129964A (en) * 1977-04-20 1978-11-13 Hitachi Ltd Method and device for inserting and taking out of heat treatment jig
JPS5469384A (en) * 1977-11-14 1979-06-04 Matsushita Electric Ind Co Ltd Electric furnace unit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09320973A (ja) * 1996-05-30 1997-12-12 Nec Yamagata Ltd ウェハ搬出入装置
JP2012009641A (ja) * 2010-06-25 2012-01-12 Koyo Thermo System Kk 連続拡散処理装置
JP2012009638A (ja) * 2010-06-25 2012-01-12 Koyo Thermo System Kk 連続拡散処理装置

Also Published As

Publication number Publication date
JPH0151051B2 (enExample) 1989-11-01

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