JPS5874701A - 高分子薄膜の形成方法 - Google Patents

高分子薄膜の形成方法

Info

Publication number
JPS5874701A
JPS5874701A JP17402281A JP17402281A JPS5874701A JP S5874701 A JPS5874701 A JP S5874701A JP 17402281 A JP17402281 A JP 17402281A JP 17402281 A JP17402281 A JP 17402281A JP S5874701 A JPS5874701 A JP S5874701A
Authority
JP
Japan
Prior art keywords
monomer
film
thin
base film
polymer film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17402281A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6340201B2 (cg-RX-API-DMAC7.html
Inventor
Masahiro Hotta
堀田　正裕
Takeshi Aragai
新貝　健
Yoshiyuki Fukumoto
福本　義行
Yoji Kono
河野　陽二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Chemical Co Ltd
Original Assignee
Sekisui Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Chemical Co Ltd filed Critical Sekisui Chemical Co Ltd
Priority to JP17402281A priority Critical patent/JPS5874701A/ja
Publication of JPS5874701A publication Critical patent/JPS5874701A/ja
Publication of JPS6340201B2 publication Critical patent/JPS6340201B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Polymerisation Methods In General (AREA)
JP17402281A 1981-10-29 1981-10-29 高分子薄膜の形成方法 Granted JPS5874701A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17402281A JPS5874701A (ja) 1981-10-29 1981-10-29 高分子薄膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17402281A JPS5874701A (ja) 1981-10-29 1981-10-29 高分子薄膜の形成方法

Publications (2)

Publication Number Publication Date
JPS5874701A true JPS5874701A (ja) 1983-05-06
JPS6340201B2 JPS6340201B2 (cg-RX-API-DMAC7.html) 1988-08-10

Family

ID=15971267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17402281A Granted JPS5874701A (ja) 1981-10-29 1981-10-29 高分子薄膜の形成方法

Country Status (1)

Country Link
JP (1) JPS5874701A (cg-RX-API-DMAC7.html)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59164304A (ja) * 1983-03-07 1984-09-17 Mitsubishi Electric Corp 高分子重合膜形成装置
JPS60104134A (ja) * 1983-11-09 1985-06-08 Matsushita Electric Ind Co Ltd プラズマ重合コ−テイング装置
US4842893A (en) * 1983-12-19 1989-06-27 Spectrum Control, Inc. High speed process for coating substrates
US5018048A (en) * 1983-12-19 1991-05-21 Spectrum Control, Inc. Miniaturized monolithic multi-layer capacitor and apparatus and method for making
US5032461A (en) * 1983-12-19 1991-07-16 Spectrum Control, Inc. Method of making a multi-layered article
US5097800A (en) * 1983-12-19 1992-03-24 Spectrum Control, Inc. High speed apparatus for forming capacitors
US5125138A (en) * 1983-12-19 1992-06-30 Spectrum Control, Inc. Miniaturized monolithic multi-layer capacitor and apparatus and method for making same

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59164304A (ja) * 1983-03-07 1984-09-17 Mitsubishi Electric Corp 高分子重合膜形成装置
JPS60104134A (ja) * 1983-11-09 1985-06-08 Matsushita Electric Ind Co Ltd プラズマ重合コ−テイング装置
US4842893A (en) * 1983-12-19 1989-06-27 Spectrum Control, Inc. High speed process for coating substrates
US5018048A (en) * 1983-12-19 1991-05-21 Spectrum Control, Inc. Miniaturized monolithic multi-layer capacitor and apparatus and method for making
US5032461A (en) * 1983-12-19 1991-07-16 Spectrum Control, Inc. Method of making a multi-layered article
US5097800A (en) * 1983-12-19 1992-03-24 Spectrum Control, Inc. High speed apparatus for forming capacitors
US5125138A (en) * 1983-12-19 1992-06-30 Spectrum Control, Inc. Miniaturized monolithic multi-layer capacitor and apparatus and method for making same

Also Published As

Publication number Publication date
JPS6340201B2 (cg-RX-API-DMAC7.html) 1988-08-10

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