JPS5855646Y2 - 半導体基板移し替え装置 - Google Patents

半導体基板移し替え装置

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Publication number
JPS5855646Y2
JPS5855646Y2 JP1977096124U JP9612477U JPS5855646Y2 JP S5855646 Y2 JPS5855646 Y2 JP S5855646Y2 JP 1977096124 U JP1977096124 U JP 1977096124U JP 9612477 U JP9612477 U JP 9612477U JP S5855646 Y2 JPS5855646 Y2 JP S5855646Y2
Authority
JP
Japan
Prior art keywords
semiconductor substrate
carrier
carriers
semiconductor
semiconductor substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977096124U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5423576U (enrdf_load_stackoverflow
Inventor
学 立石
Original Assignee
九州日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 九州日本電気株式会社 filed Critical 九州日本電気株式会社
Priority to JP1977096124U priority Critical patent/JPS5855646Y2/ja
Publication of JPS5423576U publication Critical patent/JPS5423576U/ja
Application granted granted Critical
Publication of JPS5855646Y2 publication Critical patent/JPS5855646Y2/ja
Expired legal-status Critical Current

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JP1977096124U 1977-07-18 1977-07-18 半導体基板移し替え装置 Expired JPS5855646Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977096124U JPS5855646Y2 (ja) 1977-07-18 1977-07-18 半導体基板移し替え装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977096124U JPS5855646Y2 (ja) 1977-07-18 1977-07-18 半導体基板移し替え装置

Publications (2)

Publication Number Publication Date
JPS5423576U JPS5423576U (enrdf_load_stackoverflow) 1979-02-16
JPS5855646Y2 true JPS5855646Y2 (ja) 1983-12-20

Family

ID=29029712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977096124U Expired JPS5855646Y2 (ja) 1977-07-18 1977-07-18 半導体基板移し替え装置

Country Status (1)

Country Link
JP (1) JPS5855646Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI663671B (zh) * 2015-04-30 2019-06-21 環球晶圓股份有限公司 晶圓轉換裝置及其晶圓轉換方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5633149U (enrdf_load_stackoverflow) * 1979-08-17 1981-04-01

Also Published As

Publication number Publication date
JPS5423576U (enrdf_load_stackoverflow) 1979-02-16

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