JPS6221012Y2 - - Google Patents
Info
- Publication number
- JPS6221012Y2 JPS6221012Y2 JP15650982U JP15650982U JPS6221012Y2 JP S6221012 Y2 JPS6221012 Y2 JP S6221012Y2 JP 15650982 U JP15650982 U JP 15650982U JP 15650982 U JP15650982 U JP 15650982U JP S6221012 Y2 JPS6221012 Y2 JP S6221012Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holding claws
- wafer holding
- susceptor
- shafts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 52
- 210000000078 claw Anatomy 0.000 claims description 24
- 238000006243 chemical reaction Methods 0.000 description 14
- 239000000428 dust Substances 0.000 description 4
- 239000010453 quartz Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15650982U JPS5961535U (ja) | 1982-10-15 | 1982-10-15 | ウエ−ハ搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15650982U JPS5961535U (ja) | 1982-10-15 | 1982-10-15 | ウエ−ハ搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5961535U JPS5961535U (ja) | 1984-04-23 |
| JPS6221012Y2 true JPS6221012Y2 (enrdf_load_stackoverflow) | 1987-05-28 |
Family
ID=30345319
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15650982U Granted JPS5961535U (ja) | 1982-10-15 | 1982-10-15 | ウエ−ハ搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5961535U (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3107310B2 (ja) * | 1988-11-30 | 2000-11-06 | 東京エレクトロン株式会社 | 処理装置 |
-
1982
- 1982-10-15 JP JP15650982U patent/JPS5961535U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5961535U (ja) | 1984-04-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR960005240B1 (ko) | 기판처리장치 | |
| US4674621A (en) | Substrate processing apparatus | |
| JP3558345B2 (ja) | 関節アーム式移送装置 | |
| US6623235B2 (en) | Robot arm edge gripping device for handling substrates using two four-bar linkages | |
| US6077026A (en) | Programmable substrate support for a substrate positioning system | |
| US8752872B2 (en) | Edge grip end effector | |
| CN101226893B (zh) | 高温机器人末端操作器 | |
| CN201352552Y (zh) | 用于高温提取的先进fi叶片 | |
| KR100355484B1 (ko) | 막으로 코팅된 기판을 지지하기 위한 기구 및 방법 | |
| KR200436002Y1 (ko) | 이중 아암 로봇 | |
| US6913302B2 (en) | Robot arm edge gripping device for handling substrates | |
| JPS6221012Y2 (enrdf_load_stackoverflow) | ||
| US5236295A (en) | Arm apparatus for conveying semiconductor wafer and processing system using same | |
| JP3138554B2 (ja) | ウエハ支持装置 | |
| CN119170472A (zh) | 一种离子注入机及其使用方法 | |
| JP2000133692A (ja) | 搬送装置 | |
| JPH02140948A (ja) | 真空処理装置 | |
| JP3395799B2 (ja) | 基板搬送装置および熱処理装置 | |
| US4646418A (en) | Carrier for photomask substrate | |
| JPH01261843A (ja) | ウェハースハンドリング用チャック | |
| JP2564432Y2 (ja) | 基板移載用調整治具 | |
| JP2926592B2 (ja) | 基板処理装置 | |
| JPH0456146A (ja) | 基板処理装置 | |
| JPH019171Y2 (enrdf_load_stackoverflow) | ||
| JP2000260846A (ja) | 半導体製造装置 |