JPS5852827A - ドライエツチング方法および装置 - Google Patents

ドライエツチング方法および装置

Info

Publication number
JPS5852827A
JPS5852827A JP56150618A JP15061881A JPS5852827A JP S5852827 A JPS5852827 A JP S5852827A JP 56150618 A JP56150618 A JP 56150618A JP 15061881 A JP15061881 A JP 15061881A JP S5852827 A JPS5852827 A JP S5852827A
Authority
JP
Japan
Prior art keywords
dry etching
gas
reaction tank
reaction
ultraviolet rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56150618A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0429220B2 (OSRAM
Inventor
Yoshimichi Hirobe
広部　嘉道
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56150618A priority Critical patent/JPS5852827A/ja
Publication of JPS5852827A publication Critical patent/JPS5852827A/ja
Publication of JPH0429220B2 publication Critical patent/JPH0429220B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/287—
    • H10P32/30—

Landscapes

  • Drying Of Semiconductors (AREA)
JP56150618A 1981-09-25 1981-09-25 ドライエツチング方法および装置 Granted JPS5852827A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56150618A JPS5852827A (ja) 1981-09-25 1981-09-25 ドライエツチング方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56150618A JPS5852827A (ja) 1981-09-25 1981-09-25 ドライエツチング方法および装置

Publications (2)

Publication Number Publication Date
JPS5852827A true JPS5852827A (ja) 1983-03-29
JPH0429220B2 JPH0429220B2 (OSRAM) 1992-05-18

Family

ID=15500802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56150618A Granted JPS5852827A (ja) 1981-09-25 1981-09-25 ドライエツチング方法および装置

Country Status (1)

Country Link
JP (1) JPS5852827A (OSRAM)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6057937A (ja) * 1983-09-09 1985-04-03 Ushio Inc 紫外線洗浄方法
JPS6048237U (ja) * 1983-09-09 1985-04-04 ウシオ電機株式会社 紫外線洗浄装置
JPS6048236U (ja) * 1983-09-09 1985-04-04 ウシオ電機株式会社 紫外線洗浄装置の開閉扉
JPS62273732A (ja) * 1986-05-21 1987-11-27 Toshiba Corp 光励起ガス処理装置
US6350391B1 (en) 1995-11-09 2002-02-26 Oramir Semiconductor Equipment Ltd. Laser stripping improvement by modified gas composition

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55149643A (en) * 1979-05-07 1980-11-21 Perkin Elmer Corp Method and device for chemically treating material to be treated
JPS56105480A (en) * 1980-01-25 1981-08-21 Mitsubishi Electric Corp Plasma etching method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55149643A (en) * 1979-05-07 1980-11-21 Perkin Elmer Corp Method and device for chemically treating material to be treated
JPS56105480A (en) * 1980-01-25 1981-08-21 Mitsubishi Electric Corp Plasma etching method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6057937A (ja) * 1983-09-09 1985-04-03 Ushio Inc 紫外線洗浄方法
JPS6048237U (ja) * 1983-09-09 1985-04-04 ウシオ電機株式会社 紫外線洗浄装置
JPS6048236U (ja) * 1983-09-09 1985-04-04 ウシオ電機株式会社 紫外線洗浄装置の開閉扉
JPS62273732A (ja) * 1986-05-21 1987-11-27 Toshiba Corp 光励起ガス処理装置
US6350391B1 (en) 1995-11-09 2002-02-26 Oramir Semiconductor Equipment Ltd. Laser stripping improvement by modified gas composition

Also Published As

Publication number Publication date
JPH0429220B2 (OSRAM) 1992-05-18

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