JPS5851452A - 分析電子顕微鏡 - Google Patents

分析電子顕微鏡

Info

Publication number
JPS5851452A
JPS5851452A JP56148021A JP14802181A JPS5851452A JP S5851452 A JPS5851452 A JP S5851452A JP 56148021 A JP56148021 A JP 56148021A JP 14802181 A JP14802181 A JP 14802181A JP S5851452 A JPS5851452 A JP S5851452A
Authority
JP
Japan
Prior art keywords
energy
electron beam
sample
analyzer
electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56148021A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6332220B2 (enrdf_load_stackoverflow
Inventor
Tetsuo Oikawa
哲夫 及川
Kojin Kondo
行人 近藤
Masao Inoue
雅夫 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP56148021A priority Critical patent/JPS5851452A/ja
Publication of JPS5851452A publication Critical patent/JPS5851452A/ja
Publication of JPS6332220B2 publication Critical patent/JPS6332220B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP56148021A 1981-09-19 1981-09-19 分析電子顕微鏡 Granted JPS5851452A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56148021A JPS5851452A (ja) 1981-09-19 1981-09-19 分析電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56148021A JPS5851452A (ja) 1981-09-19 1981-09-19 分析電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS5851452A true JPS5851452A (ja) 1983-03-26
JPS6332220B2 JPS6332220B2 (enrdf_load_stackoverflow) 1988-06-29

Family

ID=15443327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56148021A Granted JPS5851452A (ja) 1981-09-19 1981-09-19 分析電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS5851452A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004165146A (ja) * 2002-08-02 2004-06-10 Leo Elektronenmikroskopie Gmbh 電子顕微鏡システム
EP1463089A3 (en) * 2003-03-24 2009-07-29 Hitachi High-Technologies Corporation Electron microscope with an energy filter

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5227349A (en) * 1975-08-28 1977-03-01 Siemens Ag Transmission scanning particle beam microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5227349A (en) * 1975-08-28 1977-03-01 Siemens Ag Transmission scanning particle beam microscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004165146A (ja) * 2002-08-02 2004-06-10 Leo Elektronenmikroskopie Gmbh 電子顕微鏡システム
EP1463089A3 (en) * 2003-03-24 2009-07-29 Hitachi High-Technologies Corporation Electron microscope with an energy filter

Also Published As

Publication number Publication date
JPS6332220B2 (enrdf_load_stackoverflow) 1988-06-29

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