JPS5849568Y2 - 電子顕微鏡等における試料装置 - Google Patents

電子顕微鏡等における試料装置

Info

Publication number
JPS5849568Y2
JPS5849568Y2 JP3776979U JP3776979U JPS5849568Y2 JP S5849568 Y2 JPS5849568 Y2 JP S5849568Y2 JP 3776979 U JP3776979 U JP 3776979U JP 3776979 U JP3776979 U JP 3776979U JP S5849568 Y2 JPS5849568 Y2 JP S5849568Y2
Authority
JP
Japan
Prior art keywords
sample
sample holder
holder
moving
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3776979U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55137454U (enExample
Inventor
秀雄 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP3776979U priority Critical patent/JPS5849568Y2/ja
Publication of JPS55137454U publication Critical patent/JPS55137454U/ja
Application granted granted Critical
Publication of JPS5849568Y2 publication Critical patent/JPS5849568Y2/ja
Expired legal-status Critical Current

Links

JP3776979U 1979-03-23 1979-03-23 電子顕微鏡等における試料装置 Expired JPS5849568Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3776979U JPS5849568Y2 (ja) 1979-03-23 1979-03-23 電子顕微鏡等における試料装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3776979U JPS5849568Y2 (ja) 1979-03-23 1979-03-23 電子顕微鏡等における試料装置

Publications (2)

Publication Number Publication Date
JPS55137454U JPS55137454U (enExample) 1980-09-30
JPS5849568Y2 true JPS5849568Y2 (ja) 1983-11-11

Family

ID=28901448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3776979U Expired JPS5849568Y2 (ja) 1979-03-23 1979-03-23 電子顕微鏡等における試料装置

Country Status (1)

Country Link
JP (1) JPS5849568Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0323649Y2 (enExample) * 1985-12-27 1991-05-23
JP6054728B2 (ja) * 2012-12-10 2016-12-27 日本電子株式会社 試料位置決め装置および荷電粒子線装置

Also Published As

Publication number Publication date
JPS55137454U (enExample) 1980-09-30

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