JPS5847851B2 - チタン層を有する半導体素子の製造方法 - Google Patents

チタン層を有する半導体素子の製造方法

Info

Publication number
JPS5847851B2
JPS5847851B2 JP50023752A JP2375275A JPS5847851B2 JP S5847851 B2 JPS5847851 B2 JP S5847851B2 JP 50023752 A JP50023752 A JP 50023752A JP 2375275 A JP2375275 A JP 2375275A JP S5847851 B2 JPS5847851 B2 JP S5847851B2
Authority
JP
Japan
Prior art keywords
layer
titanium layer
oxide film
electrode
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP50023752A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5198957A (cg-RX-API-DMAC10.html
Inventor
喜顕 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP50023752A priority Critical patent/JPS5847851B2/ja
Publication of JPS5198957A publication Critical patent/JPS5198957A/ja
Publication of JPS5847851B2 publication Critical patent/JPS5847851B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H10W72/90—

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Weting (AREA)
JP50023752A 1975-02-26 1975-02-26 チタン層を有する半導体素子の製造方法 Expired JPS5847851B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50023752A JPS5847851B2 (ja) 1975-02-26 1975-02-26 チタン層を有する半導体素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50023752A JPS5847851B2 (ja) 1975-02-26 1975-02-26 チタン層を有する半導体素子の製造方法

Publications (2)

Publication Number Publication Date
JPS5198957A JPS5198957A (cg-RX-API-DMAC10.html) 1976-08-31
JPS5847851B2 true JPS5847851B2 (ja) 1983-10-25

Family

ID=12119035

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50023752A Expired JPS5847851B2 (ja) 1975-02-26 1975-02-26 チタン層を有する半導体素子の製造方法

Country Status (1)

Country Link
JP (1) JPS5847851B2 (cg-RX-API-DMAC10.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6193629A (ja) * 1984-10-15 1986-05-12 Nec Corp 半導体装置の製造方法
JPS6340367A (ja) * 1986-08-05 1988-02-20 Mitsubishi Electric Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5198957A (cg-RX-API-DMAC10.html) 1976-08-31

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