JPS5842441Y2 - 蒸着装置 - Google Patents

蒸着装置

Info

Publication number
JPS5842441Y2
JPS5842441Y2 JP1978178021U JP17802178U JPS5842441Y2 JP S5842441 Y2 JPS5842441 Y2 JP S5842441Y2 JP 1978178021 U JP1978178021 U JP 1978178021U JP 17802178 U JP17802178 U JP 17802178U JP S5842441 Y2 JPS5842441 Y2 JP S5842441Y2
Authority
JP
Japan
Prior art keywords
metal mask
vapor deposition
semiconductor substrate
flat magnet
foil metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978178021U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5591864U (Direct
Inventor
高明 阿部
博 藤崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1978178021U priority Critical patent/JPS5842441Y2/ja
Publication of JPS5591864U publication Critical patent/JPS5591864U/ja
Application granted granted Critical
Publication of JPS5842441Y2 publication Critical patent/JPS5842441Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1978178021U 1978-12-19 1978-12-19 蒸着装置 Expired JPS5842441Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978178021U JPS5842441Y2 (ja) 1978-12-19 1978-12-19 蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978178021U JPS5842441Y2 (ja) 1978-12-19 1978-12-19 蒸着装置

Publications (2)

Publication Number Publication Date
JPS5591864U JPS5591864U (Direct) 1980-06-25
JPS5842441Y2 true JPS5842441Y2 (ja) 1983-09-26

Family

ID=29188083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978178021U Expired JPS5842441Y2 (ja) 1978-12-19 1978-12-19 蒸着装置

Country Status (1)

Country Link
JP (1) JPS5842441Y2 (Direct)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5547496Y2 (Direct) * 1973-06-19 1980-11-07
JPS5018974A (Direct) * 1973-06-22 1975-02-27
JPS5161782A (ja) * 1974-11-27 1976-05-28 Hitachi Ltd Pataansakuseisochi

Also Published As

Publication number Publication date
JPS5591864U (Direct) 1980-06-25

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