JPS5770273A - Method for fixing mask for vapor deposition - Google Patents

Method for fixing mask for vapor deposition

Info

Publication number
JPS5770273A
JPS5770273A JP14514380A JP14514380A JPS5770273A JP S5770273 A JPS5770273 A JP S5770273A JP 14514380 A JP14514380 A JP 14514380A JP 14514380 A JP14514380 A JP 14514380A JP S5770273 A JPS5770273 A JP S5770273A
Authority
JP
Japan
Prior art keywords
substrate plate
vapor deposition
mask
magnet
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14514380A
Other languages
Japanese (ja)
Inventor
Takeo Miyata
Takuhiro Ono
Masami Honma
Koichi Kawada
Yuuji Hashidate
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP14514380A priority Critical patent/JPS5770273A/en
Publication of JPS5770273A publication Critical patent/JPS5770273A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE:To eliminate displacement of a position as well as to facilitate detachment by a method wherein a mask for vapor deposition comprising a magnetic material is placed at a desired position of a substrate plate and fixed to said substrate plate by a magnet through said substrate plate. CONSTITUTION:A mask 2 for vapor deposition comporising a magnetic material is fixed to a desired position by a magnet 6 through a substrate plate 1 and a composite body comprising the substrate plate 1, the mask 2 and the magnet 6 is fixed in the air by a holding tool 4. In this condition, if an evaporation substrate is evaporated from a boat 3, only a periphery on a surface of the substrate plate can be uniformly vapor deposited.
JP14514380A 1980-10-16 1980-10-16 Method for fixing mask for vapor deposition Pending JPS5770273A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14514380A JPS5770273A (en) 1980-10-16 1980-10-16 Method for fixing mask for vapor deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14514380A JPS5770273A (en) 1980-10-16 1980-10-16 Method for fixing mask for vapor deposition

Publications (1)

Publication Number Publication Date
JPS5770273A true JPS5770273A (en) 1982-04-30

Family

ID=15378405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14514380A Pending JPS5770273A (en) 1980-10-16 1980-10-16 Method for fixing mask for vapor deposition

Country Status (1)

Country Link
JP (1) JPS5770273A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59179777A (en) * 1983-03-30 1984-10-12 Ulvac Corp Pattern forming device in continuous thin film forming device
JPS59194406A (en) * 1983-04-18 1984-11-05 Matsushita Electric Ind Co Ltd High permeability magnetic material
WO2000037707A1 (en) * 1998-12-21 2000-06-29 Uhp Corporation Local selective surface processing with magnetic mask holder
WO2005106081A1 (en) * 2004-05-04 2005-11-10 OTB Oberflächentechnik in Berlin GmbH & Co. Method and system for selectively coating or etching surfaces

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59179777A (en) * 1983-03-30 1984-10-12 Ulvac Corp Pattern forming device in continuous thin film forming device
JPS6324065B2 (en) * 1983-03-30 1988-05-19 Ulvac Corp
JPS59194406A (en) * 1983-04-18 1984-11-05 Matsushita Electric Ind Co Ltd High permeability magnetic material
WO2000037707A1 (en) * 1998-12-21 2000-06-29 Uhp Corporation Local selective surface processing with magnetic mask holder
WO2005106081A1 (en) * 2004-05-04 2005-11-10 OTB Oberflächentechnik in Berlin GmbH & Co. Method and system for selectively coating or etching surfaces

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