JPS5591864U - - Google Patents

Info

Publication number
JPS5591864U
JPS5591864U JP17802178U JP17802178U JPS5591864U JP S5591864 U JPS5591864 U JP S5591864U JP 17802178 U JP17802178 U JP 17802178U JP 17802178 U JP17802178 U JP 17802178U JP S5591864 U JPS5591864 U JP S5591864U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17802178U
Other languages
Japanese (ja)
Other versions
JPS5842441Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978178021U priority Critical patent/JPS5842441Y2/ja
Publication of JPS5591864U publication Critical patent/JPS5591864U/ja
Application granted granted Critical
Publication of JPS5842441Y2 publication Critical patent/JPS5842441Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1978178021U 1978-12-19 1978-12-19 蒸着装置 Expired JPS5842441Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978178021U JPS5842441Y2 (ja) 1978-12-19 1978-12-19 蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978178021U JPS5842441Y2 (ja) 1978-12-19 1978-12-19 蒸着装置

Publications (2)

Publication Number Publication Date
JPS5591864U true JPS5591864U (Direct) 1980-06-25
JPS5842441Y2 JPS5842441Y2 (ja) 1983-09-26

Family

ID=29188083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978178021U Expired JPS5842441Y2 (ja) 1978-12-19 1978-12-19 蒸着装置

Country Status (1)

Country Link
JP (1) JPS5842441Y2 (Direct)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5018974A (Direct) * 1973-06-22 1975-02-27
JPS5018454U (Direct) * 1973-06-19 1975-02-28
JPS5161782A (ja) * 1974-11-27 1976-05-28 Hitachi Ltd Pataansakuseisochi

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5018454U (Direct) * 1973-06-19 1975-02-28
JPS5018974A (Direct) * 1973-06-22 1975-02-27
JPS5161782A (ja) * 1974-11-27 1976-05-28 Hitachi Ltd Pataansakuseisochi

Also Published As

Publication number Publication date
JPS5842441Y2 (ja) 1983-09-26

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