JPS5831549A - 半導体素子検査装置 - Google Patents

半導体素子検査装置

Info

Publication number
JPS5831549A
JPS5831549A JP56129675A JP12967581A JPS5831549A JP S5831549 A JPS5831549 A JP S5831549A JP 56129675 A JP56129675 A JP 56129675A JP 12967581 A JP12967581 A JP 12967581A JP S5831549 A JPS5831549 A JP S5831549A
Authority
JP
Japan
Prior art keywords
time
test
wafer
testing
processor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56129675A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6229901B2 (enrdf_load_stackoverflow
Inventor
Yasushi Matsukawa
靖 松川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56129675A priority Critical patent/JPS5831549A/ja
Publication of JPS5831549A publication Critical patent/JPS5831549A/ja
Publication of JPS6229901B2 publication Critical patent/JPS6229901B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP56129675A 1981-08-19 1981-08-19 半導体素子検査装置 Granted JPS5831549A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56129675A JPS5831549A (ja) 1981-08-19 1981-08-19 半導体素子検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56129675A JPS5831549A (ja) 1981-08-19 1981-08-19 半導体素子検査装置

Publications (2)

Publication Number Publication Date
JPS5831549A true JPS5831549A (ja) 1983-02-24
JPS6229901B2 JPS6229901B2 (enrdf_load_stackoverflow) 1987-06-29

Family

ID=15015381

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56129675A Granted JPS5831549A (ja) 1981-08-19 1981-08-19 半導体素子検査装置

Country Status (1)

Country Link
JP (1) JPS5831549A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01291440A (ja) * 1988-05-18 1989-11-24 Tokyo Electron Ltd プロービィング方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01291440A (ja) * 1988-05-18 1989-11-24 Tokyo Electron Ltd プロービィング方法

Also Published As

Publication number Publication date
JPS6229901B2 (enrdf_load_stackoverflow) 1987-06-29

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