JPS5831549A - Inspecting system - Google Patents

Abstract

PURPOSE:To enable an inspecting system which can efficiently operate an inspecting facility by prenotifying the ending time of a testing work. CONSTITUTION:Wafer probes 2, 2' test by a testing unit 1 chips on a wafer, and when all chips are completely tested, a test end signal of one wafer is fed to a processor 3. The processor 3 reads out by a clock 4 a time of receiving the signal, and obtains a difference from the time of the previous test end signal, i.e., the testing time of one wafer. When the testing times of the wafers of the previously arbitrarily specified number are obtained, the mean testing time of one wafer can be decided. The processor 3 decides the planed test end time of the lot is estimated from the obtained mean testing time and indicates it on an indicator 6. When the time before the arbitrarily set prescribed time of the planted time comes, the finish of the test of this lot after the prescribed time is indicated on the indicator 6. The finishing time is prenotified by applying a simple device.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an inspection system, and more particularly to an inspection system for measuring and testing an integrated circuit ring.

Semiconductor integrated circuits are manufactured by woofers after the diffusion process during their manufacturing process.
・Product testing is performed after the blobbing test and the assembly process, and the electrical characteristics are inspected using the IA test equipment, a wafer probe that handles the wafer, or a handler that handles the product. A handling device such as this is used. However, the progress of integrated circuits in recent years has been remarkable, and as a result, test equipment has become more sophisticated.
Handling equipment has become increasingly automated and highly functional, and both have become extremely expensive. Therefore, it is desirable to make effective use of the apparatus, and the present invention aims at making effective use of such an inspection apparatus.

The present invention provides an inspection system composed of a test device, a device for handling test objects, etc., which includes a means for counting the test time of each test object, and a means for counting the test time of each test object, and a means for counting the test time based on a preset number of test objects and the test time. The present invention is an inspection system characterized by comprising: a means for giving advance notice of a test end time for the entire test object;

The case of the wafer roving test will be explained below.

Several hundred integrated circuit chips are normally formed on a semiconductor wafer, and the number of integrated circuit chips naturally varies depending on the product type.The measurement time for one chip also naturally varies depending on the product type, and the measurement time for a defective chip is usually longer than that for a good chip. The length is short, and the yield also varies depending on the variety. Therefore, the testing time for l-quafer tests naturally varies depending on the variety, and some are longer while others are shorter. The test time here does not mean pure measurement time but the time required for the test including index time and the like. In general, one test device requires 2 to 3
A handling device for each wafer prober, that is, a wafer prober, is connected and tests are performed in a time-division operation.In this case, the types handled by each wafer prober are not necessarily the same, and tests are often performed using combinations of different types. Therefore, the testing time per wafer varies depending on the type of wafer being tested in other wafer probers. The time required for testing 10 tests on several dozen wafers varies from case to case, and it is difficult to determine the end time of the test. Conventionally, this has been confirmed by a worker who performs 10 test completion tests. Therefore, if the operator is slow to act, the expensive testing equipment will be left unused for a long time, and the testing equipment cannot be operated efficiently. The present invention provides an inspection system that eliminates these drawbacks and efficiently operates inspection equipment.

The present invention will be explained below. FIG. 1 shows an embodiment of the present invention, in which 1 is a sample mounting device, 2 is a Hauer prober, 3 is a processing device composed of a micro combinator, etc., and 4 is a device for counting time. In other words, the clock, 5 is the console, and 6 is the display device. To explain the operation, the wafer prober 2.2' tests each step on the wafer using the testing device 11, and when all the chips have been tested Ik', the test for one wafer is completed. Send the time to processing device-3. , processing I & position 3 reads the time when the test end signal was received from time fft4, and determines the end of the previous test '/
(Calculate the difference from the time in No. 71, that is, the test time for one wafer. By calculating this for the number of wafers specified by arbitrary vc, divide the average test time for one wafer. At the start of the 10 test work, the number of 10 wafers, etc. is input from the console 5, so the processing device 3 calculates the scheduled end time of the test for that loft based on the obtained average test time. It is displayed on the display unit 6. Also, when a predetermined time that is arbitrarily set before the scheduled test end time is reached, a number is displayed on the display unit 6 to indicate that the test for that loft will end after that predetermined time.

By adding such a simple device, it becomes possible to give advance notice of the end time. In the present invention, the time is announced by successively determining actual test times, so it does not matter how the test product changes or the test product in the other wafer proper.

In this embodiment, the processing device 3 for giving advance notice of the time is treated separately from the test device 1 and the wafer probers 2, 2', but generally speaking
It is clear that the handling device may be controlled by a micro combinator or a mini combinator, and the processing device 3 could be replaced by the combinator.

In addition, as explained above in the case of the wafer roving test, the Ueno prober is used as a product nodding device, and the test end signal for one product is used as the test end signal for one product. If the number of sheets is treated as the number of products, it can also be applied to product inspection and checking systems.

As explained above, according to the present invention, it is possible to give advance notice of the end time of test work, which is expected to improve the operating rate of expensive testing equipment, and also enables systematic test work. A significant improvement in productivity is expected.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing one embodiment of the present invention. In the same figure, l... test device, 2.2'...
...Quehar prober, 3...Processing device, 4...Time hand count device (clock), 5...
- Console, 6...Display device. Agent Patent Attorney Susumu Uchihara

Claims (1)

[Claims] In an inspection system consisting of a test device, a device for handling test objects, etc., there is a means for counting the test time for each test object, and a means for counting the test time for each test object, and a means for counting the test time for each test object, and counting the test time based on a preset number of test objects and the test time. An inspection system characterized by comprising: means for notifying the end time of the test for the entire test object.