JPS5829458B2 - ヒヨウメンケンサソウチ - Google Patents
ヒヨウメンケンサソウチInfo
- Publication number
- JPS5829458B2 JPS5829458B2 JP743068A JP306874A JPS5829458B2 JP S5829458 B2 JPS5829458 B2 JP S5829458B2 JP 743068 A JP743068 A JP 743068A JP 306874 A JP306874 A JP 306874A JP S5829458 B2 JPS5829458 B2 JP S5829458B2
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- mirror
- optical path
- rotating
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Mechanical Optical Scanning Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP743068A JPS5829458B2 (ja) | 1973-12-25 | 1973-12-25 | ヒヨウメンケンサソウチ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP743068A JPS5829458B2 (ja) | 1973-12-25 | 1973-12-25 | ヒヨウメンケンサソウチ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5097386A JPS5097386A (enrdf_load_stackoverflow) | 1975-08-02 |
JPS5829458B2 true JPS5829458B2 (ja) | 1983-06-22 |
Family
ID=11546999
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP743068A Expired JPS5829458B2 (ja) | 1973-12-25 | 1973-12-25 | ヒヨウメンケンサソウチ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5829458B2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4338822A (en) * | 1978-06-20 | 1982-07-13 | Sumitomo Metal Industries, Ltd. | Method and apparatus for non-contact ultrasonic flaw detection |
JPS58216938A (ja) * | 1982-06-11 | 1983-12-16 | Kawasaki Steel Corp | 金属物体表面探傷装置 |
JP2003522399A (ja) * | 2000-02-11 | 2003-07-22 | タイコ エレクトロニクス ベルギー イーシー エヌ ブイ | プリント配線基板 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5333857B2 (enrdf_load_stackoverflow) * | 1972-03-18 | 1978-09-18 |
-
1973
- 1973-12-25 JP JP743068A patent/JPS5829458B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5097386A (enrdf_load_stackoverflow) | 1975-08-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4013367A (en) | Apparatus for detecting irregularities in the surfaces of materials | |
US4260899A (en) | Wide web laser scanner flaw detection method and apparatus | |
US4855608A (en) | Laser curtain having an array of parabolic mirrors each focusing radiation on a corresponding detector positioned in mirror's focal point | |
JP3430780B2 (ja) | 物体表面の形状検出方法 | |
JP4384737B2 (ja) | 高速欠陥分析用の検査装置 | |
JPS5849819B2 (ja) | ソウサシキケンサソウチ | |
US4274748A (en) | Method and device for inspecting a moving sheet material for streaklike defects | |
US4005926A (en) | Scanning device | |
JPH064655U (ja) | 平坦な物品の欠陥検出装置 | |
US5083035A (en) | Position location in surface scanning using interval timing between scan marks on test wafers | |
US4390277A (en) | Flat sheet scatterometer | |
US4227812A (en) | Method of determining a dimension of an article | |
JPS5829458B2 (ja) | ヒヨウメンケンサソウチ | |
JPS58204353A (ja) | 金属物体表面探傷方法 | |
JPS6125042A (ja) | 表面欠陥検査装置 | |
US3958128A (en) | System for determining a transversal position of any defect in a traveling sheet material | |
JPS61176838A (ja) | 透明または半透明の板状体の欠点検査方法 | |
JPS61254809A (ja) | 形状不良検出装置 | |
JP3168480B2 (ja) | 異物検査方法、および異物検査装置 | |
JPH0422444B2 (enrdf_load_stackoverflow) | ||
JPS58204348A (ja) | 金属物体表面探傷方法 | |
JPS62179642A (ja) | 表面欠陥検出装置 | |
JP3174615B2 (ja) | 欠陥検査装置における投光光学系 | |
JPS6219725B2 (enrdf_load_stackoverflow) | ||
JPH04273047A (ja) | 表面欠陥検査装置 |