JPS5829458B2 - ヒヨウメンケンサソウチ - Google Patents

ヒヨウメンケンサソウチ

Info

Publication number
JPS5829458B2
JPS5829458B2 JP743068A JP306874A JPS5829458B2 JP S5829458 B2 JPS5829458 B2 JP S5829458B2 JP 743068 A JP743068 A JP 743068A JP 306874 A JP306874 A JP 306874A JP S5829458 B2 JPS5829458 B2 JP S5829458B2
Authority
JP
Japan
Prior art keywords
inspected
mirror
optical path
rotating
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP743068A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5097386A (enrdf_load_stackoverflow
Inventor
誠吉 西邑
幸男 長尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP743068A priority Critical patent/JPS5829458B2/ja
Publication of JPS5097386A publication Critical patent/JPS5097386A/ja
Publication of JPS5829458B2 publication Critical patent/JPS5829458B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Mechanical Optical Scanning Systems (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP743068A 1973-12-25 1973-12-25 ヒヨウメンケンサソウチ Expired JPS5829458B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP743068A JPS5829458B2 (ja) 1973-12-25 1973-12-25 ヒヨウメンケンサソウチ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP743068A JPS5829458B2 (ja) 1973-12-25 1973-12-25 ヒヨウメンケンサソウチ

Publications (2)

Publication Number Publication Date
JPS5097386A JPS5097386A (enrdf_load_stackoverflow) 1975-08-02
JPS5829458B2 true JPS5829458B2 (ja) 1983-06-22

Family

ID=11546999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP743068A Expired JPS5829458B2 (ja) 1973-12-25 1973-12-25 ヒヨウメンケンサソウチ

Country Status (1)

Country Link
JP (1) JPS5829458B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1980000099A1 (fr) * 1978-06-20 1980-01-24 Sumitomo Metal Ind Methode et appareil de detection supersonique de defauts sans contact
JPS58216938A (ja) * 1982-06-11 1983-12-16 Kawasaki Steel Corp 金属物体表面探傷装置
WO2001060135A1 (en) * 2000-02-11 2001-08-16 Tyco Electronics Belgium Ec N.V. Printed circuit board

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5333857B2 (enrdf_load_stackoverflow) * 1972-03-18 1978-09-18

Also Published As

Publication number Publication date
JPS5097386A (enrdf_load_stackoverflow) 1975-08-02

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