JPS5829458B2 - Hiyoumen Kensa Sochi - Google Patents
Hiyoumen Kensa SochiInfo
- Publication number
- JPS5829458B2 JPS5829458B2 JP743068A JP306874A JPS5829458B2 JP S5829458 B2 JPS5829458 B2 JP S5829458B2 JP 743068 A JP743068 A JP 743068A JP 306874 A JP306874 A JP 306874A JP S5829458 B2 JPS5829458 B2 JP S5829458B2
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- mirror
- optical path
- rotating
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Mechanical Optical Scanning Systems (AREA)
Description
【発明の詳細な説明】
本発明は、例えば圧延機で圧延された圧延材又はコイル
状の平板等による被検査体の表面の亀裂部又は損傷部を
高速度で検査する表面検査装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a surface inspection apparatus for inspecting at high speed cracks or damaged areas on the surface of an object to be inspected, such as a rolled material rolled in a rolling mill or a coiled flat plate.
既に提案されている飛点走査式の表面検査装置は、−走
査視界（ユニット視界ともいう）を形成する発光装置及
び回転ミラー、振動ミラーの走査駆動系とより構成され
ており、特に、幅広い被検査体の表面検査には少くな（
とも２以上のユニット視界を必要とする関係上、複数の
単位表面検査装置を組込まなければならないので、安価
に提供することが困難であるばかりでなく、各単位表面
検査装置の組合せによる表面検査であるため、各ユニッ
ト視界の走査系同志の各光束及び毎分数百回転に及ぶ各
回転ミラーを同期させなげれば、正確な表面検査が難し
く、技術的にも難点があった。The flying point scanning type surface inspection equipment that has already been proposed consists of a light emitting device that forms a scanning field of view (also called a unit field of view), a rotating mirror, and a scanning drive system of a vibrating mirror. For surface inspection of the test object, there are few (
Since both require two or more units of field of view, it is necessary to incorporate multiple unit surface inspection devices, which not only makes it difficult to provide at a low cost, but also makes it difficult to perform surface inspection by combining each unit surface inspection device. Therefore, accurate surface inspection is difficult and technically difficult unless the light beams of the scanning systems in each unit's field of view and the rotating mirrors, which rotate several hundred times per minute, are synchronized.
本発明は上述した点にかんがみ、集光レンズを有するレ
ーザー発振器の光路上に高速度で回転する回転ミラーを
設け、この回転ミラーの出射光路上にしてしかも幅広い
被検査体の上位に少くなくとも２以上のハーフミラ−若
しくは反射鏡を等距離にそれぞれ配設し、これらの反射
光を受光するようにした上記被検査体の照射光を受光す
るように受光検出器を配設し、これにより被検査体の表
面を検査するようにしたことを目的とする表面検査装置
を提供するものである。In view of the above-mentioned points, the present invention provides a rotating mirror that rotates at high speed on the optical path of a laser oscillator having a condensing lens. Two or more half mirrors or reflecting mirrors are arranged at equal distances from each other, and a light receiving detector is arranged to receive the irradiated light of the object to be inspected. The present invention provides a surface inspection device whose purpose is to inspect the surface of an object to be inspected.
以下、本発明を図示の一実施例について説明する。Hereinafter, the present invention will be described with reference to an illustrated embodiment.
第１図において符号１はレーザー発振器であって、この
レーザー発振器１の先端部には集光レンズ２が設けられ
ており、この集光レンズ２の光路上には回転ミラー３が
高速度で回転し得るように配設されている。In FIG. 1, reference numeral 1 denotes a laser oscillator, and a condenser lens 2 is provided at the tip of the laser oscillator 1. On the optical path of the condenser lens 2, a rotating mirror 3 rotates at high speed. It is arranged so that it can be done.
又この回転ミラー３の出射光路上には第１ミラー４、第
２ミラー５、第３ミラー６、が順に傾斜して配設されて
いる。Further, a first mirror 4, a second mirror 5, and a third mirror 6 are tilted and disposed in this order on the output optical path of the rotating mirror 3.
この各ミラー４，５，６は幅広い被検査体８の上位でか
つ前記回転ミラー３から各反射鏡４，５．６を介して走
行する被検査体８までの各光路長を等しくなるように位
置して、この被検査体８０表面を複数のユニット視界に
分割するとともにそれぞれ均一な反射光で照射し得るよ
うになっている。These mirrors 4, 5, and 6 are located above the wide object 8 to be inspected, and are arranged so that the optical path lengths from the rotary mirror 3 to the object 8 traveling through the reflecting mirrors 4, 5, and 6 are equal. The surface of the object to be inspected 80 is divided into a plurality of unit fields of view, and each unit can be irradiated with uniform reflected light.
即ち、上記回転ミラー３からの光束は、第１ミラー４に
よって上記被検査体８の第１視界８ａを照射し、前記第
２ミラー５によって上記被検査体８の第２視界８ｂを照
射し、第３ミラー６によって上記被検査体８の第３視界
８ｃをそれぞれ均等に照射するようになっている。That is, the light flux from the rotating mirror 3 illuminates a first field of view 8a of the object to be inspected 8 by the first mirror 4, and illuminates a second field of view 8b of the object to be inspected 8 by the second mirror 5, The third mirror 6 uniformly illuminates the third field of view 8c of the object 8 to be inspected.
レーザ光は各ミラー４，５゜６を介した回転ミラー３か
ら被検査体表面に至ろ各光路長が等しくなって被検査体
表面の全域を網羅して走査する。The laser beam scans the entire surface of the object to be inspected, with each optical path length being equal from the rotating mirror 3 to the surface of the object to be inspected via the mirrors 4 and 5.6.
一方、上記被検査体８は、第１図において、紙背がわへ
高速度で搬送されており、またレーザ光は第４．５．６
のミラーおよび回転ミラー３０作用により被検査体表面
の全域を網羅して走査しており上記被検査体８０表面に
均一に照射された光束はこの被検査体８で反射して、例
えば光電変換素子のような受光検出器９ａ、９ｂ、９ｃ
、９ｄに受光されるようになっている。On the other hand, the object to be inspected 8 is being conveyed at high speed along the paper spine in FIG.
The entire area of the surface of the object to be inspected is scanned by the action of the mirror and the rotating mirror 30, and the light beam uniformly irradiated onto the surface of the object to be inspected 80 is reflected by the object 8 to be inspected, and the light beam is reflected by the object to be inspected, for example, a photoelectric conversion element. Light receiving detectors 9a, 9b, 9c such as
, 9d.
従って、この各受光検出器９ ａ 、９ ｂ 、９ Ｃ
５９ｄは走行する被検査体８の表面に亀裂や損傷を検出
しなければ、この被検査体８からの均一な照射光束を受
光しても警報を発しないが、走行する被検査体８の表面
に異常があると、上記各光検出器９ ａ 、９ ｂ ｔ
９ ｃ ｔ ９ ｄがこれを検出して警報を発するよ
うになっている。Therefore, each of the light receiving detectors 9 a , 9 b , 9 C
If 59d does not detect any cracks or damage on the surface of the moving object 8, it will not issue an alarm even if it receives a uniform beam of light from this object 8; If there is an abnormality, each of the photodetectors 9a, 9bt
9ct9d detects this and issues an alarm.
次に第２図に示される実施例は本発明の他の実施例であ
って、回転ミラー３からの出射光路上に分光プリズム１
０及び各偏向プリズム１１ａ。Next, the embodiment shown in FIG.
0 and each deflection prism 11a.
１１ｂを配設し、この各偏向プリズム１１ａ。11b, and each deflecting prism 11a.
１１ｂからの光束を各受光検出器９ａ、９ｂｔ９ｃ 、
９ｄと一体をなす各第１、第２、第３、第４、ミラー４
，５，６，７に移送し、しかる後、走行する被検査体８
を照射し、上記各受光検出器９ａ、９ｂ、９ｃ、９ｄに
よって被検査体８の表面を検出するようにしたものであ
り、実質的には上述した第１図の具体例と同じ内容のも
のである。The light flux from 11b is transmitted to each light receiving detector 9a, 9bt9c,
Each of the first, second, third, fourth, and mirror 4 integral with 9d
, 5, 6, and 7, and then the object to be inspected 8 is moved.
is irradiated and the surface of the object to be inspected 8 is detected by each of the light receiving detectors 9a, 9b, 9c, and 9d, and is substantially the same as the specific example shown in FIG. 1 described above. It is.
以上述べたように本発明によれば、集光レンズ２を有す
るレーザー発振器１の光路上に高速度で回転する回転ミ
ラー３を設け、この回転ミラー３の出射光路上にしてし
かも幅広い被検査体８の上位に少くなくとも２以上のミ
ラー４，５，６゜７を斜設し、上記被検査体８の照射光
を各受光検出器９ａｔ９ｂｔ９ｃｔ９ｄで受光して検出
するようになっているので、照射光源を唯一のレーザー
発振器１で兼用できるから、構成も簡素化され、しかも
均一な各ユニット視界を簡単に得ることもできるばかり
でなく、安価に提供できる等の優れた効果を有する。As described above, according to the present invention, the rotating mirror 3 that rotates at high speed is provided on the optical path of the laser oscillator 1 having the condenser lens 2, and the rotating mirror 3 that rotates at high speed is placed on the optical path of the laser oscillator 1 having the condensing lens 2. At least two or more mirrors 4, 5, 6° 7 are diagonally installed above the inspection object 8, and each light receiving detector 9at9bt9ct9d receives and detects the irradiated light from the object to be inspected. Since only one laser oscillator 1 can be used as the irradiation light source, the configuration is simplified, and it not only makes it possible to easily obtain a uniform field of view for each unit, but also has excellent effects such as being able to be provided at a low cost.
また各ミラー４，５，６，７を介した回転ミラー３から
被検査体表面に至る各光路長が等しくなるように各ミラ
ー４，５，６，７を配置する構成のため、光路長の違い
によって被検査体の表面のレーザー光のスポットが各ユ
ニット視野で異なるようなことがなくし得る。In addition, since each mirror 4, 5, 6, 7 is arranged so that each optical path length from the rotating mirror 3 to the surface of the object to be inspected via each mirror 4, 5, 6, 7 is equal, the optical path length is It is possible to prevent the spot of the laser beam on the surface of the object to be inspected from being different in each unit field of view due to the difference.
そのことは各ユニット視野において検出感度が同じすな
わち各ユニット視野によって検出感度が異なることがな
い。This means that the detection sensitivity is the same in each unit field of view, that is, the detection sensitivity does not differ depending on the unit field of view.
第１図は本発明による表面検査装置の線図、第２図は本
発明の他の実施例を示す図である。
１・・・・・・レーザー発振器、２・・・・・・集光レ
ンズ、３・・・・・・回転ミラー、４，５，６，７・・
・・・・ミラー、８・・・・・・被検査体、９ ａ 、
９ ｂ 、９ ｃ 、９ ｄ・・・・・・受光検出器。FIG. 1 is a diagram of a surface inspection apparatus according to the present invention, and FIG. 2 is a diagram showing another embodiment of the present invention. 1... Laser oscillator, 2... Condensing lens, 3... Rotating mirror, 4, 5, 6, 7...
...Mirror, 8...Object to be inspected, 9a,
9b, 9c, 9d... Light receiving detector.
Claims (1)
たは振動するミラーによって反射し、被検査体の表面上
において前記レーザー光を走査させ、前記被検査体の表
面と作用した光から前記被検査体の表面に存在する欠陥
を検出するものにおいて、前記回転または振動するミラ
ーの出射光路上で、かっこの回転または振動するミラー
から前記被検査体に至る間の光路長を等しくしつつ前記
被検査体の幅方向を複数のユニット視野に分割する位置
にそれぞれ配置される少なくとも２以上の固定ハーフミ
ラ−若しくはミラーを備えたことを特徴とする表面検査
装置。1. A laser beam output from a laser oscillator is reflected by a rotating or vibrating mirror, the laser beam is scanned over the surface of the object to be inspected, and the surface of the object to be inspected is detected from the light that interacts with the surface of the object to be inspected. In the apparatus for detecting defects present in the object to be inspected, on the output optical path of the rotating or vibrating mirror, the width of the object to be inspected is equalized while the optical path length from the rotating or vibrating mirror to the object to be inspected is equalized. A surface inspection device comprising at least two or more fixed half mirrors or mirrors arranged at positions that divide a direction into a plurality of unit fields of view.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP743068A JPS5829458B2 (en) | 1973-12-25 | 1973-12-25 | Hiyoumen Kensa Sochi |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP743068A JPS5829458B2 (en) | 1973-12-25 | 1973-12-25 | Hiyoumen Kensa Sochi |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5097386A JPS5097386A (en) | 1975-08-02 |
| JPS5829458B2 true JPS5829458B2 (en) | 1983-06-22 |
Family
ID=11546999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP743068A Expired JPS5829458B2 (en) | 1973-12-25 | 1973-12-25 | Hiyoumen Kensa Sochi |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5829458B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2952885C2 (en) * | 1978-06-20 | 1986-01-30 | Sumitomo Metal Industries, Ltd., Osaka | Device for non-contact ultrasonic flaw testing |
| JPS58216938A (en) * | 1982-06-11 | 1983-12-16 | Kawasaki Steel Corp | Surface flaw detector for metal object |
| EP1254592B1 (en) * | 2000-02-11 | 2009-01-07 | Tyco Electronics Belgium EC N.V. | Printed circuit board |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4895845A (en) * | 1972-03-18 | 1973-12-08 |
-
1973
- 1973-12-25 JP JP743068A patent/JPS5829458B2/en not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4895845A (en) * | 1972-03-18 | 1973-12-08 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5097386A (en) | 1975-08-02 |
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