JPS5825233A - 電子ビ−ム直接描画に於ける重ね合せマ−ク保存法 - Google Patents

電子ビ−ム直接描画に於ける重ね合せマ−ク保存法

Info

Publication number
JPS5825233A
JPS5825233A JP12380081A JP12380081A JPS5825233A JP S5825233 A JPS5825233 A JP S5825233A JP 12380081 A JP12380081 A JP 12380081A JP 12380081 A JP12380081 A JP 12380081A JP S5825233 A JPS5825233 A JP S5825233A
Authority
JP
Japan
Prior art keywords
film
mark
electron beam
pattern
negative
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12380081A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0216571B2 (fr
Inventor
Akira Shirakawa
白川　明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Sanyo Denki Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Sanyo Denki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd, Sanyo Denki Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP12380081A priority Critical patent/JPS5825233A/ja
Publication of JPS5825233A publication Critical patent/JPS5825233A/ja
Publication of JPH0216571B2 publication Critical patent/JPH0216571B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP12380081A 1981-08-06 1981-08-06 電子ビ−ム直接描画に於ける重ね合せマ−ク保存法 Granted JPS5825233A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12380081A JPS5825233A (ja) 1981-08-06 1981-08-06 電子ビ−ム直接描画に於ける重ね合せマ−ク保存法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12380081A JPS5825233A (ja) 1981-08-06 1981-08-06 電子ビ−ム直接描画に於ける重ね合せマ−ク保存法

Publications (2)

Publication Number Publication Date
JPS5825233A true JPS5825233A (ja) 1983-02-15
JPH0216571B2 JPH0216571B2 (fr) 1990-04-17

Family

ID=14869622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12380081A Granted JPS5825233A (ja) 1981-08-06 1981-08-06 電子ビ−ム直接描画に於ける重ね合せマ−ク保存法

Country Status (1)

Country Link
JP (1) JPS5825233A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63100380A (ja) * 1986-08-01 1988-05-02 インタ−シル，インコ−ポレ−テツド 交流電力損失検出装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63100380A (ja) * 1986-08-01 1988-05-02 インタ−シル，インコ−ポレ−テツド 交流電力損失検出装置

Also Published As

Publication number Publication date
JPH0216571B2 (fr) 1990-04-17

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