JPS58209156A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS58209156A
JPS58209156A JP57091296A JP9129682A JPS58209156A JP S58209156 A JPS58209156 A JP S58209156A JP 57091296 A JP57091296 A JP 57091296A JP 9129682 A JP9129682 A JP 9129682A JP S58209156 A JPS58209156 A JP S58209156A
Authority
JP
Japan
Prior art keywords
melting point
point metal
layer
silicon layer
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57091296A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0427709B2 (OSRAM
Inventor
Hideo Oikawa
及川　秀男
Oku Kuraki
億 久良木
Tsuneo Mano
真野　恒夫
Kazuhide Kiuchi
木内　一秀
Ban Nakajima
中島　蕃
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP57091296A priority Critical patent/JPS58209156A/ja
Publication of JPS58209156A publication Critical patent/JPS58209156A/ja
Publication of JPH0427709B2 publication Critical patent/JPH0427709B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B20/00—Read-only memory [ROM] devices

Landscapes

  • Formation Of Insulating Films (AREA)
  • Semiconductor Memories (AREA)
JP57091296A 1982-05-31 1982-05-31 半導体装置の製造方法 Granted JPS58209156A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57091296A JPS58209156A (ja) 1982-05-31 1982-05-31 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57091296A JPS58209156A (ja) 1982-05-31 1982-05-31 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS58209156A true JPS58209156A (ja) 1983-12-06
JPH0427709B2 JPH0427709B2 (OSRAM) 1992-05-12

Family

ID=14022502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57091296A Granted JPS58209156A (ja) 1982-05-31 1982-05-31 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS58209156A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60231357A (ja) * 1984-04-28 1985-11-16 Fujitsu Ltd 半導体記憶装置
JPH01129444A (ja) * 1987-11-14 1989-05-22 Fujitsu Ltd 半導体記憶装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53108392A (en) * 1977-03-04 1978-09-21 Hitachi Ltd Semiconductor device
JPS55154762A (en) * 1979-05-22 1980-12-02 Chiyou Lsi Gijutsu Kenkyu Kumiai Semiconductor memory
JPS5694767A (en) * 1979-12-28 1981-07-31 Fujitsu Ltd Semiconductor device
JPS56111256A (en) * 1980-01-31 1981-09-02 Chiyou Lsi Gijutsu Kenkyu Kumiai Semiconductor memory device
JPS5750441A (en) * 1980-08-29 1982-03-24 Ibm Method of forming electric contact

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53108392A (en) * 1977-03-04 1978-09-21 Hitachi Ltd Semiconductor device
JPS55154762A (en) * 1979-05-22 1980-12-02 Chiyou Lsi Gijutsu Kenkyu Kumiai Semiconductor memory
JPS5694767A (en) * 1979-12-28 1981-07-31 Fujitsu Ltd Semiconductor device
JPS56111256A (en) * 1980-01-31 1981-09-02 Chiyou Lsi Gijutsu Kenkyu Kumiai Semiconductor memory device
JPS5750441A (en) * 1980-08-29 1982-03-24 Ibm Method of forming electric contact

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60231357A (ja) * 1984-04-28 1985-11-16 Fujitsu Ltd 半導体記憶装置
JPH01129444A (ja) * 1987-11-14 1989-05-22 Fujitsu Ltd 半導体記憶装置

Also Published As

Publication number Publication date
JPH0427709B2 (OSRAM) 1992-05-12

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