JPS58196838U - プラズマｃｖｄ装置 - Google Patents

プラズマｃｖｄ装置

Info

Publication number
JPS58196838U
JPS58196838U JP9424582U JP9424582U JPS58196838U JP S58196838 U JPS58196838 U JP S58196838U JP 9424582 U JP9424582 U JP 9424582U JP 9424582 U JP9424582 U JP 9424582U JP S58196838 U JPS58196838 U JP S58196838U
Authority
JP
Japan
Prior art keywords
plasma cvd
cvd equipment
equipment
convex curved
periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9424582U
Other languages
English (en)
Japanese (ja)
Other versions
JPH029549Y2 (enrdf_load_stackoverflow
Inventor
喜美 塩谷
小山　堅二
泰 大山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9424582U priority Critical patent/JPS58196838U/ja
Publication of JPS58196838U publication Critical patent/JPS58196838U/ja
Application granted granted Critical
Publication of JPH029549Y2 publication Critical patent/JPH029549Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP9424582U 1982-06-23 1982-06-23 プラズマｃｖｄ装置 Granted JPS58196838U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9424582U JPS58196838U (ja) 1982-06-23 1982-06-23 プラズマｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9424582U JPS58196838U (ja) 1982-06-23 1982-06-23 プラズマｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS58196838U true JPS58196838U (ja) 1983-12-27
JPH029549Y2 JPH029549Y2 (enrdf_load_stackoverflow) 1990-03-09

Family

ID=30225682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9424582U Granted JPS58196838U (ja) 1982-06-23 1982-06-23 プラズマｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPS58196838U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013245393A (ja) * 2012-05-29 2013-12-09 Shimadzu Corp サンプルホルダ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55115336A (en) * 1979-02-26 1980-09-05 Anelva Corp Plasma cvd electrode

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55115336A (en) * 1979-02-26 1980-09-05 Anelva Corp Plasma cvd electrode

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013245393A (ja) * 2012-05-29 2013-12-09 Shimadzu Corp サンプルホルダ
CN103451628A (zh) * 2012-05-29 2013-12-18 株式会社岛津制作所 样品支持器

Also Published As

Publication number Publication date
JPH029549Y2 (enrdf_load_stackoverflow) 1990-03-09

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