JPS58195848A - 自動現像装置 - Google Patents

自動現像装置

Info

Publication number
JPS58195848A
JPS58195848A JP7961782A JP7961782A JPS58195848A JP S58195848 A JPS58195848 A JP S58195848A JP 7961782 A JP7961782 A JP 7961782A JP 7961782 A JP7961782 A JP 7961782A JP S58195848 A JPS58195848 A JP S58195848A
Authority
JP
Japan
Prior art keywords
light
signal
development
image sensor
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7961782A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0421857B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Seiji Nishino
清治 西野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7961782A priority Critical patent/JPS58195848A/ja
Publication of JPS58195848A publication Critical patent/JPS58195848A/ja
Publication of JPH0421857B2 publication Critical patent/JPH0421857B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3021—Imagewise removal using liquid means from a wafer supported on a rotating chuck
    • G03F7/3028—Imagewise removal using liquid means from a wafer supported on a rotating chuck characterised by means for on-wafer monitoring of the processing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP7961782A 1982-05-11 1982-05-11 自動現像装置 Granted JPS58195848A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7961782A JPS58195848A (ja) 1982-05-11 1982-05-11 自動現像装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7961782A JPS58195848A (ja) 1982-05-11 1982-05-11 自動現像装置

Publications (2)

Publication Number Publication Date
JPS58195848A true JPS58195848A (ja) 1983-11-15
JPH0421857B2 JPH0421857B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-04-14

Family

ID=13695011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7961782A Granted JPS58195848A (ja) 1982-05-11 1982-05-11 自動現像装置

Country Status (1)

Country Link
JP (1) JPS58195848A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5230429A (en) * 1975-09-03 1977-03-08 Canon Inc Photographic image recording and processing system
JPS56145332A (en) * 1980-04-12 1981-11-12 Victor Co Of Japan Ltd Detecting device for state of proper development

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5230429A (en) * 1975-09-03 1977-03-08 Canon Inc Photographic image recording and processing system
JPS56145332A (en) * 1980-04-12 1981-11-12 Victor Co Of Japan Ltd Detecting device for state of proper development

Also Published As

Publication number Publication date
JPH0421857B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-04-14

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