JPS58194348A - ウエハ内チツプの自動種別確認方式 - Google Patents

ウエハ内チツプの自動種別確認方式

Info

Publication number
JPS58194348A
JPS58194348A JP7630382A JP7630382A JPS58194348A JP S58194348 A JPS58194348 A JP S58194348A JP 7630382 A JP7630382 A JP 7630382A JP 7630382 A JP7630382 A JP 7630382A JP S58194348 A JPS58194348 A JP S58194348A
Authority
JP
Japan
Prior art keywords
chip
wafer
button
movement amount
chips
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7630382A
Other languages
English (en)
Japanese (ja)
Other versions
JPH043107B2 (enrdf_load_stackoverflow
Inventor
Akio Yokoyama
横山　昭男
Toru Araki
徹 荒木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP7630382A priority Critical patent/JPS58194348A/ja
Publication of JPS58194348A publication Critical patent/JPS58194348A/ja
Publication of JPH043107B2 publication Critical patent/JPH043107B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54473—Marks applied to semiconductor devices or parts for use after dicing
    • H01L2223/5448—Located on chip prior to dicing and remaining on chip after dicing

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP7630382A 1982-05-07 1982-05-07 ウエハ内チツプの自動種別確認方式 Granted JPS58194348A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7630382A JPS58194348A (ja) 1982-05-07 1982-05-07 ウエハ内チツプの自動種別確認方式

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7630382A JPS58194348A (ja) 1982-05-07 1982-05-07 ウエハ内チツプの自動種別確認方式

Publications (2)

Publication Number Publication Date
JPS58194348A true JPS58194348A (ja) 1983-11-12
JPH043107B2 JPH043107B2 (enrdf_load_stackoverflow) 1992-01-22

Family

ID=13601597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7630382A Granted JPS58194348A (ja) 1982-05-07 1982-05-07 ウエハ内チツプの自動種別確認方式

Country Status (1)

Country Link
JP (1) JPS58194348A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6251235A (ja) * 1985-08-30 1987-03-05 Canon Inc ウェハ処理装置
JPH04130386U (ja) * 1991-05-23 1992-11-30 株式会社ダイクレ Ｆｒｐグレーチングの積層構造

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6251235A (ja) * 1985-08-30 1987-03-05 Canon Inc ウェハ処理装置
JPH04130386U (ja) * 1991-05-23 1992-11-30 株式会社ダイクレ Ｆｒｐグレーチングの積層構造

Also Published As

Publication number Publication date
JPH043107B2 (enrdf_load_stackoverflow) 1992-01-22

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