JPS58190038A - インライン型半導体製造装置 - Google Patents

インライン型半導体製造装置

Info

Publication number
JPS58190038A
JPS58190038A JP57072845A JP7284582A JPS58190038A JP S58190038 A JPS58190038 A JP S58190038A JP 57072845 A JP57072845 A JP 57072845A JP 7284582 A JP7284582 A JP 7284582A JP S58190038 A JPS58190038 A JP S58190038A
Authority
JP
Japan
Prior art keywords
carrier
stage
groove
moved
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57072845A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6253947B2 (member.php
Inventor
Yukihisa Taguchi
田口　幸久
Shinsui Saruwatari
新水 猿渡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP57072845A priority Critical patent/JPS58190038A/ja
Publication of JPS58190038A publication Critical patent/JPS58190038A/ja
Publication of JPS6253947B2 publication Critical patent/JPS6253947B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/3411—

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP57072845A 1982-04-30 1982-04-30 インライン型半導体製造装置 Granted JPS58190038A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57072845A JPS58190038A (ja) 1982-04-30 1982-04-30 インライン型半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57072845A JPS58190038A (ja) 1982-04-30 1982-04-30 インライン型半導体製造装置

Publications (2)

Publication Number Publication Date
JPS58190038A true JPS58190038A (ja) 1983-11-05
JPS6253947B2 JPS6253947B2 (member.php) 1987-11-12

Family

ID=13501125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57072845A Granted JPS58190038A (ja) 1982-04-30 1982-04-30 インライン型半導体製造装置

Country Status (1)

Country Link
JP (1) JPS58190038A (member.php)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60117745A (ja) * 1983-11-30 1985-06-25 Canon Hanbai Kk ウエハ−カセツト位置決め用ガイド部材
NL2006113C2 (en) * 2011-02-01 2012-08-02 Otb Solar Bv Water inspection system.

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102212421B1 (ko) * 2019-08-05 2021-02-04 고려대학교 산학협력단 전하-플라즈마 효과가 적용된 반도체 소자 및 이의 제조 방법

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60117745A (ja) * 1983-11-30 1985-06-25 Canon Hanbai Kk ウエハ−カセツト位置決め用ガイド部材
NL2006113C2 (en) * 2011-02-01 2012-08-02 Otb Solar Bv Water inspection system.
WO2012105837A1 (en) * 2011-02-01 2012-08-09 Otb Solar B.V. Wafer inspection system

Also Published As

Publication number Publication date
JPS6253947B2 (member.php) 1987-11-12

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