JPS6253947B2 - - Google Patents
Info
- Publication number
- JPS6253947B2 JPS6253947B2 JP57072845A JP7284582A JPS6253947B2 JP S6253947 B2 JPS6253947 B2 JP S6253947B2 JP 57072845 A JP57072845 A JP 57072845A JP 7284582 A JP7284582 A JP 7284582A JP S6253947 B2 JPS6253947 B2 JP S6253947B2
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- stage
- groove
- grooves
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P72/3411—
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57072845A JPS58190038A (ja) | 1982-04-30 | 1982-04-30 | インライン型半導体製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57072845A JPS58190038A (ja) | 1982-04-30 | 1982-04-30 | インライン型半導体製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58190038A JPS58190038A (ja) | 1983-11-05 |
| JPS6253947B2 true JPS6253947B2 (member.php) | 1987-11-12 |
Family
ID=13501125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57072845A Granted JPS58190038A (ja) | 1982-04-30 | 1982-04-30 | インライン型半導体製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58190038A (member.php) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021025247A1 (ko) * | 2019-08-05 | 2021-02-11 | 고려대학교 산학협력단 | 전하-플라즈마 효과가 적용된 반도체 소자 및 이의 제조 방법 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60117745A (ja) * | 1983-11-30 | 1985-06-25 | Canon Hanbai Kk | ウエハ−カセツト位置決め用ガイド部材 |
| NL2006113C2 (en) * | 2011-02-01 | 2012-08-02 | Otb Solar Bv | Water inspection system. |
-
1982
- 1982-04-30 JP JP57072845A patent/JPS58190038A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021025247A1 (ko) * | 2019-08-05 | 2021-02-11 | 고려대학교 산학협력단 | 전하-플라즈마 효과가 적용된 반도체 소자 및 이의 제조 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58190038A (ja) | 1983-11-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100510078B1 (ko) | 기판반송장치 | |
| KR20100085071A (ko) | 기판 반송 장치 및 기판 반송 방법 | |
| US20060249965A1 (en) | Gripper and method for operating the same | |
| JPS6253947B2 (member.php) | ||
| US5217341A (en) | Method for aligning wafers within a semiconductor wafer cassette | |
| KR102020227B1 (ko) | 캐리어 이송 장치 및 방법 | |
| KR20000002851U (ko) | 반도체 패키지 이송용 핸들러 | |
| JP2956665B2 (ja) | ウエハー搬送装置 | |
| JPH0211489B2 (member.php) | ||
| KR20110003610A (ko) | 복수의 웨이퍼 이송 장치 및 방법 | |
| JPS6139248B2 (member.php) | ||
| JP3029409B2 (ja) | 基板処理装置 | |
| JP2000335741A (ja) | 受渡機構および予備位置決め機構ならびに受渡方法 | |
| JP3241336B2 (ja) | 基板処理装置 | |
| KR101612414B1 (ko) | 물류 이송 시스템 | |
| JPH0526754Y2 (member.php) | ||
| KR100368164B1 (ko) | 반도체패키지용 카셋트 인/아웃 로더 및 이를 이용한 반도체패키지 제조 장치 | |
| JPH0755533Y2 (ja) | 基板収納用カセットの歪み矯正装置 | |
| JP2839913B2 (ja) | 基板保持装置 | |
| JP3100953B2 (ja) | 基板処理装置 | |
| JP3205525B2 (ja) | 基板の取出装置，搬入装置及び取出搬入装置 | |
| JPS6114827A (ja) | 回路基板の搬送位置ぎめ装置 | |
| JPH0239769Y2 (member.php) | ||
| US20030002970A1 (en) | End effector for lifting semiconductor wafer carrier | |
| KR0155450B1 (ko) | 프린트 기판의 이송방법 |