JPS58186946A - ウエハの位置決め装置 - Google Patents

ウエハの位置決め装置

Info

Publication number
JPS58186946A
JPS58186946A JP6982082A JP6982082A JPS58186946A JP S58186946 A JPS58186946 A JP S58186946A JP 6982082 A JP6982082 A JP 6982082A JP 6982082 A JP6982082 A JP 6982082A JP S58186946 A JPS58186946 A JP S58186946A
Authority
JP
Japan
Prior art keywords
wafer
roller
guide
driving roller
face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6982082A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6211503B2 (enrdf_load_stackoverflow
Inventor
Eiichi Akita
秋田　栄一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ando Electric Co Ltd
Original Assignee
Ando Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ando Electric Co Ltd filed Critical Ando Electric Co Ltd
Priority to JP6982082A priority Critical patent/JPS58186946A/ja
Publication of JPS58186946A publication Critical patent/JPS58186946A/ja
Publication of JPS6211503B2 publication Critical patent/JPS6211503B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Control Of Conveyors (AREA)
  • Feeding Of Articles To Conveyors (AREA)
JP6982082A 1982-04-26 1982-04-26 ウエハの位置決め装置 Granted JPS58186946A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6982082A JPS58186946A (ja) 1982-04-26 1982-04-26 ウエハの位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6982082A JPS58186946A (ja) 1982-04-26 1982-04-26 ウエハの位置決め装置

Publications (2)

Publication Number Publication Date
JPS58186946A true JPS58186946A (ja) 1983-11-01
JPS6211503B2 JPS6211503B2 (enrdf_load_stackoverflow) 1987-03-12

Family

ID=13413773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6982082A Granted JPS58186946A (ja) 1982-04-26 1982-04-26 ウエハの位置決め装置

Country Status (1)

Country Link
JP (1) JPS58186946A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60130217U (ja) * 1984-02-10 1985-08-31 株式会社精工舎 インデツクス付き部品の供給装置
JPS6238304A (ja) * 1985-08-14 1987-02-19 Hitachi Denshi Syst Service Kk Ｉｃウエハの自動位置決め装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3297134A (en) * 1966-02-10 1967-01-10 Ronald F Pastuszak Orienting device for discs and the like articles
JPS50122879A (enrdf_load_stackoverflow) * 1974-03-13 1975-09-26
JPS5238905U (enrdf_load_stackoverflow) * 1975-09-12 1977-03-18
JPS5392667A (en) * 1977-01-25 1978-08-14 Tokyo Seimitsu Co Ltd Device for positioning wafer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3297134A (en) * 1966-02-10 1967-01-10 Ronald F Pastuszak Orienting device for discs and the like articles
JPS50122879A (enrdf_load_stackoverflow) * 1974-03-13 1975-09-26
JPS5238905U (enrdf_load_stackoverflow) * 1975-09-12 1977-03-18
JPS5392667A (en) * 1977-01-25 1978-08-14 Tokyo Seimitsu Co Ltd Device for positioning wafer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60130217U (ja) * 1984-02-10 1985-08-31 株式会社精工舎 インデツクス付き部品の供給装置
JPS6238304A (ja) * 1985-08-14 1987-02-19 Hitachi Denshi Syst Service Kk Ｉｃウエハの自動位置決め装置

Also Published As

Publication number Publication date
JPS6211503B2 (enrdf_load_stackoverflow) 1987-03-12

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