JPS6367247U - - Google Patents

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Publication number
JPS6367247U
JPS6367247U JP16133686U JP16133686U JPS6367247U JP S6367247 U JPS6367247 U JP S6367247U JP 16133686 U JP16133686 U JP 16133686U JP 16133686 U JP16133686 U JP 16133686U JP S6367247 U JPS6367247 U JP S6367247U
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JP
Japan
Prior art keywords
wafer
section
loader
rotating member
unloader
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16133686U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0517885Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16133686U priority Critical patent/JPH0517885Y2/ja
Publication of JPS6367247U publication Critical patent/JPS6367247U/ja
Application granted granted Critical
Publication of JPH0517885Y2 publication Critical patent/JPH0517885Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP16133686U 1986-10-20 1986-10-20 Expired - Lifetime JPH0517885Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16133686U JPH0517885Y2 (enrdf_load_stackoverflow) 1986-10-20 1986-10-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16133686U JPH0517885Y2 (enrdf_load_stackoverflow) 1986-10-20 1986-10-20

Publications (2)

Publication Number Publication Date
JPS6367247U true JPS6367247U (enrdf_load_stackoverflow) 1988-05-06
JPH0517885Y2 JPH0517885Y2 (enrdf_load_stackoverflow) 1993-05-13

Family

ID=31087556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16133686U Expired - Lifetime JPH0517885Y2 (enrdf_load_stackoverflow) 1986-10-20 1986-10-20

Country Status (1)

Country Link
JP (1) JPH0517885Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03290946A (ja) * 1990-03-30 1991-12-20 Tokyo Electron Ltd 処理装置および処理方法およびレジスト処理装置
CN102690052A (zh) * 2012-05-25 2012-09-26 熊进 一种玻璃下料装置
JP2013149703A (ja) * 2012-01-18 2013-08-01 Nippon Steel & Sumikin Fine Technology Co Ltd ウエハ搬送装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03290946A (ja) * 1990-03-30 1991-12-20 Tokyo Electron Ltd 処理装置および処理方法およびレジスト処理装置
JP2013149703A (ja) * 2012-01-18 2013-08-01 Nippon Steel & Sumikin Fine Technology Co Ltd ウエハ搬送装置
CN102690052A (zh) * 2012-05-25 2012-09-26 熊进 一种玻璃下料装置

Also Published As

Publication number Publication date
JPH0517885Y2 (enrdf_load_stackoverflow) 1993-05-13

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