JPS58184A - 絶縁ゲ−ト形半導体装置の製造方法 - Google Patents
絶縁ゲ−ト形半導体装置の製造方法Info
- Publication number
- JPS58184A JPS58184A JP57065341A JP6534182A JPS58184A JP S58184 A JPS58184 A JP S58184A JP 57065341 A JP57065341 A JP 57065341A JP 6534182 A JP6534182 A JP 6534182A JP S58184 A JPS58184 A JP S58184A
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- film
- polycrystalline silicon
- forming
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01014—Silicon [Si]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01015—Phosphorus [P]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57065341A JPS58184A (ja) | 1982-04-21 | 1982-04-21 | 絶縁ゲ−ト形半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57065341A JPS58184A (ja) | 1982-04-21 | 1982-04-21 | 絶縁ゲ−ト形半導体装置の製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50047536A Division JPS5846851B2 (ja) | 1975-04-21 | 1975-04-21 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58184A true JPS58184A (ja) | 1983-01-05 |
| JPS62591B2 JPS62591B2 (enrdf_load_stackoverflow) | 1987-01-08 |
Family
ID=13284141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57065341A Granted JPS58184A (ja) | 1982-04-21 | 1982-04-21 | 絶縁ゲ−ト形半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58184A (enrdf_load_stackoverflow) |
-
1982
- 1982-04-21 JP JP57065341A patent/JPS58184A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62591B2 (enrdf_load_stackoverflow) | 1987-01-08 |
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