JPS58180041A - 判導体集積回路装置の製造方法 - Google Patents

判導体集積回路装置の製造方法

Info

Publication number
JPS58180041A
JPS58180041A JP58054136A JP5413683A JPS58180041A JP S58180041 A JPS58180041 A JP S58180041A JP 58054136 A JP58054136 A JP 58054136A JP 5413683 A JP5413683 A JP 5413683A JP S58180041 A JPS58180041 A JP S58180041A
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
silicon
film
electrode wiring
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58054136A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6145859B2 (ko
Inventor
Toshio Hara
利夫 原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP58054136A priority Critical patent/JPS58180041A/ja
Publication of JPS58180041A publication Critical patent/JPS58180041A/ja
Publication of JPS6145859B2 publication Critical patent/JPS6145859B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Memories (AREA)
JP58054136A 1983-03-30 1983-03-30 判導体集積回路装置の製造方法 Granted JPS58180041A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58054136A JPS58180041A (ja) 1983-03-30 1983-03-30 判導体集積回路装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58054136A JPS58180041A (ja) 1983-03-30 1983-03-30 判導体集積回路装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP3550176A Division JPS52117591A (en) 1976-03-30 1976-03-30 Semiconductor integrating circuit device

Publications (2)

Publication Number Publication Date
JPS58180041A true JPS58180041A (ja) 1983-10-21
JPS6145859B2 JPS6145859B2 (ko) 1986-10-09

Family

ID=12962159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58054136A Granted JPS58180041A (ja) 1983-03-30 1983-03-30 判導体集積回路装置の製造方法

Country Status (1)

Country Link
JP (1) JPS58180041A (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6365645A (ja) * 1986-09-05 1988-03-24 Nec Corp 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6365645A (ja) * 1986-09-05 1988-03-24 Nec Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6145859B2 (ko) 1986-10-09

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