JPS52117591A - Semiconductor integrating circuit device - Google Patents

Semiconductor integrating circuit device

Info

Publication number
JPS52117591A
JPS52117591A JP3550176A JP3550176A JPS52117591A JP S52117591 A JPS52117591 A JP S52117591A JP 3550176 A JP3550176 A JP 3550176A JP 3550176 A JP3550176 A JP 3550176A JP S52117591 A JPS52117591 A JP S52117591A
Authority
JP
Japan
Prior art keywords
circuit device
integrating circuit
layers
semiconductor integrating
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3550176A
Other languages
Japanese (ja)
Inventor
Toshio Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP3550176A priority Critical patent/JPS52117591A/en
Publication of JPS52117591A publication Critical patent/JPS52117591A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To avoid the short between the two layers and increase the integration, by using the material withstanding the corrosive solution used for the opening hole of the insulating film between the two layers, in opening the contact hole to the insulating film on the multi crystal Si layer of upper and lower two layers insulated each other and in making connection to the upper layer multi crystal.
COPYRIGHT: (C)1977,JPO&Japio
JP3550176A 1976-03-30 1976-03-30 Semiconductor integrating circuit device Pending JPS52117591A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3550176A JPS52117591A (en) 1976-03-30 1976-03-30 Semiconductor integrating circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3550176A JPS52117591A (en) 1976-03-30 1976-03-30 Semiconductor integrating circuit device

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP5413783A Division JPS6057705B2 (en) 1983-03-30 1983-03-30 Semiconductor integrated circuit device
JP58054136A Division JPS58180041A (en) 1983-03-30 1983-03-30 Semiconductor integrated circuit device
JP64084A Division JPS6029224B2 (en) 1984-01-06 1984-01-06 Semiconductor integrated circuit device

Publications (1)

Publication Number Publication Date
JPS52117591A true JPS52117591A (en) 1977-10-03

Family

ID=12443493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3550176A Pending JPS52117591A (en) 1976-03-30 1976-03-30 Semiconductor integrating circuit device

Country Status (1)

Country Link
JP (1) JPS52117591A (en)

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