JPS5817443A - フオトレジスト現像方法および装置 - Google Patents

フオトレジスト現像方法および装置

Info

Publication number
JPS5817443A
JPS5817443A JP11503081A JP11503081A JPS5817443A JP S5817443 A JPS5817443 A JP S5817443A JP 11503081 A JP11503081 A JP 11503081A JP 11503081 A JP11503081 A JP 11503081A JP S5817443 A JPS5817443 A JP S5817443A
Authority
JP
Japan
Prior art keywords
vapor
development
wafer
developer
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11503081A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0225501B2 (OSRAM
Inventor
Tomio Nakazawa
中沢　富夫
Kazuya Kadota
和也 門田
Yoshimichi Hirobe
広部　嘉道
Maki Nagao
長尾　眞樹
Hideaki Azuma
東　英明
Yoichi Tagi
洋一 多木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Microcomputer System Ltd
Hitachi Ltd
Original Assignee
Hitachi Ltd
Hitachi Microcomputer Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Microcomputer Engineering Ltd filed Critical Hitachi Ltd
Priority to JP11503081A priority Critical patent/JPS5817443A/ja
Publication of JPS5817443A publication Critical patent/JPS5817443A/ja
Publication of JPH0225501B2 publication Critical patent/JPH0225501B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3021—Imagewise removal using liquid means from a wafer supported on a rotating chuck

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP11503081A 1981-07-24 1981-07-24 フオトレジスト現像方法および装置 Granted JPS5817443A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11503081A JPS5817443A (ja) 1981-07-24 1981-07-24 フオトレジスト現像方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11503081A JPS5817443A (ja) 1981-07-24 1981-07-24 フオトレジスト現像方法および装置

Publications (2)

Publication Number Publication Date
JPS5817443A true JPS5817443A (ja) 1983-02-01
JPH0225501B2 JPH0225501B2 (OSRAM) 1990-06-04

Family

ID=14652474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11503081A Granted JPS5817443A (ja) 1981-07-24 1981-07-24 フオトレジスト現像方法および装置

Country Status (1)

Country Link
JP (1) JPS5817443A (OSRAM)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63250125A (ja) * 1987-04-06 1988-10-18 Nec Yamagata Ltd 半導体装置の製造方法
US4889781A (en) * 1985-09-27 1989-12-26 Nokia Graetz Process and apparatus for producing a black matrix layer
JPH06196397A (ja) * 1992-08-27 1994-07-15 Nec Corp レジスト現像方法及びその装置
US5700629A (en) * 1990-02-19 1997-12-23 Hitachi Chemical Company, Ltd. Developing process
US6025118A (en) * 1998-05-12 2000-02-15 Sony Corporation Glassmastering photoresist read after write method and system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5067577A (OSRAM) * 1973-10-15 1975-06-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5067577A (OSRAM) * 1973-10-15 1975-06-06

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4889781A (en) * 1985-09-27 1989-12-26 Nokia Graetz Process and apparatus for producing a black matrix layer
JPS63250125A (ja) * 1987-04-06 1988-10-18 Nec Yamagata Ltd 半導体装置の製造方法
US5700629A (en) * 1990-02-19 1997-12-23 Hitachi Chemical Company, Ltd. Developing process
JPH06196397A (ja) * 1992-08-27 1994-07-15 Nec Corp レジスト現像方法及びその装置
US6025118A (en) * 1998-05-12 2000-02-15 Sony Corporation Glassmastering photoresist read after write method and system

Also Published As

Publication number Publication date
JPH0225501B2 (OSRAM) 1990-06-04

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