JPS58169762A - 電子線装置 - Google Patents

電子線装置

Info

Publication number
JPS58169762A
JPS58169762A JP57050019A JP5001982A JPS58169762A JP S58169762 A JPS58169762 A JP S58169762A JP 57050019 A JP57050019 A JP 57050019A JP 5001982 A JP5001982 A JP 5001982A JP S58169762 A JPS58169762 A JP S58169762A
Authority
JP
Japan
Prior art keywords
sample
magnetic pole
electron beam
hole
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57050019A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0211976B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Takashi Yanaka
谷中　隆志
Kazuo Osawa
大沢　一夫
Kosuke Kyogoku
京極　光祐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INTERNATL PRECISION Inc
Original Assignee
INTERNATL PRECISION Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INTERNATL PRECISION Inc filed Critical INTERNATL PRECISION Inc
Priority to JP57050019A priority Critical patent/JPS58169762A/ja
Priority to GB08308260A priority patent/GB2118770B/en
Priority to US06/479,172 priority patent/US4596934A/en
Publication of JPS58169762A publication Critical patent/JPS58169762A/ja
Publication of JPH0211976B2 publication Critical patent/JPH0211976B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP57050019A 1982-03-30 1982-03-30 電子線装置 Granted JPS58169762A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP57050019A JPS58169762A (ja) 1982-03-30 1982-03-30 電子線装置
GB08308260A GB2118770B (en) 1982-03-30 1983-03-25 Specimen holder for electron microscope
US06/479,172 US4596934A (en) 1982-03-30 1983-03-28 Electron beam apparatus with improved specimen holder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57050019A JPS58169762A (ja) 1982-03-30 1982-03-30 電子線装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP63335202A Division JPH01236566A (ja) 1988-12-29 1988-12-29 電子線装置

Publications (2)

Publication Number Publication Date
JPS58169762A true JPS58169762A (ja) 1983-10-06
JPH0211976B2 JPH0211976B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-03-16

Family

ID=12847278

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57050019A Granted JPS58169762A (ja) 1982-03-30 1982-03-30 電子線装置

Country Status (3)

Country Link
US (1) US4596934A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS58169762A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB2118770B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04229540A (ja) * 1990-12-26 1992-08-19 Jeol Ltd 透過電子顕微鏡用試料交換装置
JP2005522833A (ja) * 2002-04-08 2005-07-28 イー エイ フィシオネ インストルメンツ インコーポレーテッド 試料保持装置
WO2022181128A1 (ja) * 2021-02-24 2022-09-01 株式会社デンソーウェーブ 三次元計測システム
JP2022128586A (ja) * 2021-02-23 2022-09-02 ブルーカー アーイクスエス ゲーエムベーハー Ｔｅｍグリッド用途のためのツール

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4595481A (en) * 1984-08-21 1986-06-17 Komag, Inc. Disk carrier
JP2569011B2 (ja) * 1986-06-11 1997-01-08 株式会社日立製作所 走査電子顕微鏡
JPH0614460B2 (ja) * 1987-05-22 1994-02-23 日本電子株式会社 電子顕微鏡等における試料装置
US4954712A (en) * 1989-10-16 1990-09-04 Wilcox Harry P Specimen retaining ring system for an electron microscope
US5153434A (en) * 1990-05-18 1992-10-06 Hitachi, Ltd. Electron microscope and method for observing microscopic image
EP0504972A1 (en) * 1991-03-18 1992-09-23 Koninklijke Philips Electronics N.V. Specimen holder for use in a charged particle beam device
US5289005A (en) * 1992-05-29 1994-02-22 Jeol Ltd. Electron microscope
KR940007963A (ko) * 1992-09-03 1994-04-28 오오가 노리오 판그물 및 투과형 전자현미경용 시료의 연마방법
JPH06181045A (ja) * 1992-10-13 1994-06-28 Hitachi Ltd 像観察方法及び透過電子顕微鏡装置
US5698856A (en) * 1996-08-05 1997-12-16 Frasca; Peter Specimen holder for electron microscope
US6221614B1 (en) * 1997-02-21 2001-04-24 The Regents Of The University Of California Removal of prions from blood, plasma and other liquids
US6002136A (en) * 1998-05-08 1999-12-14 International Business Machines Corporation Microscope specimen holder and grid arrangement for in-situ and ex-situ repeated analysis
WO2002103337A2 (en) * 2001-06-15 2002-12-27 Ebara Corporation Electron beam apparatus and method for using said apparatus
DE10258104B4 (de) * 2002-12-11 2005-11-03 Leica Mikrosysteme Gmbh Präparathalter mit Entnahmehilfe für die Mikrotomie und die AFM-Mikroskopie
JP2008159513A (ja) * 2006-12-26 2008-07-10 Jeol Ltd 電子顕微鏡用試料ホルダー
JP2009152087A (ja) * 2007-12-21 2009-07-09 Jeol Ltd 透過電子顕微鏡
WO2014013709A1 (ja) * 2012-07-17 2014-01-23 株式会社メルビル 試料ホルダー先端部、及び前記試料ホルダー先端部を有する試料ホルダー、並びにゴニオステージ、及び当該ゴニオステージを有する電子顕微鏡
JP6061771B2 (ja) * 2013-04-25 2017-01-18 株式会社日立製作所 試料ホルダおよびそれを用いた荷電粒子線装置
US20160139397A1 (en) * 2014-11-15 2016-05-19 Noah Fram-Schwartz Specimen Stand
US11577296B2 (en) * 2018-03-12 2023-02-14 Massachusetts Institute Of Technology Devices and methods for holding a sample for multi-axial testing
JP7322284B2 (ja) * 2020-04-15 2023-08-07 株式会社日立ハイテク 搬送装置および解析システム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4931500U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-06-16 1974-03-18
JPS5126608U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-08-17 1976-02-26

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL282644A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1962-08-29 1964-12-28

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4931500U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-06-16 1974-03-18
JPS5126608U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-08-17 1976-02-26

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04229540A (ja) * 1990-12-26 1992-08-19 Jeol Ltd 透過電子顕微鏡用試料交換装置
JP2005522833A (ja) * 2002-04-08 2005-07-28 イー エイ フィシオネ インストルメンツ インコーポレーテッド 試料保持装置
JP2022128586A (ja) * 2021-02-23 2022-09-02 ブルーカー アーイクスエス ゲーエムベーハー Ｔｅｍグリッド用途のためのツール
WO2022181128A1 (ja) * 2021-02-24 2022-09-01 株式会社デンソーウェーブ 三次元計測システム
JPWO2022181128A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 2021-02-24 2022-09-01

Also Published As

Publication number Publication date
GB2118770A (en) 1983-11-02
US4596934A (en) 1986-06-24
JPH0211976B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-03-16
GB2118770B (en) 1985-12-18
GB8308260D0 (en) 1983-05-05

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