JPS58167907A - 回転物体の回転中心位置検出方法 - Google Patents

回転物体の回転中心位置検出方法

Info

Publication number
JPS58167907A
JPS58167907A JP57051581A JP5158182A JPS58167907A JP S58167907 A JPS58167907 A JP S58167907A JP 57051581 A JP57051581 A JP 57051581A JP 5158182 A JP5158182 A JP 5158182A JP S58167907 A JPS58167907 A JP S58167907A
Authority
JP
Japan
Prior art keywords
prism
measured
rotation
light
interference fringes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57051581A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6334402B2 (enrdf_load_stackoverflow
Inventor
Joji Matsuda
浄史 松田
Tomoaki Nagasu
永寿　伴章
Suketsugu Enomoto
祐嗣 榎本
Yoshitaro Yoshida
嘉太郎 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP57051581A priority Critical patent/JPS58167907A/ja
Priority to US06/424,629 priority patent/US4529310A/en
Publication of JPS58167907A publication Critical patent/JPS58167907A/ja
Publication of JPS6334402B2 publication Critical patent/JPS6334402B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP57051581A 1981-12-17 1982-03-30 回転物体の回転中心位置検出方法 Granted JPS58167907A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP57051581A JPS58167907A (ja) 1982-03-30 1982-03-30 回転物体の回転中心位置検出方法
US06/424,629 US4529310A (en) 1981-12-17 1982-09-27 Device for detection of center of rotation of rotating object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57051581A JPS58167907A (ja) 1982-03-30 1982-03-30 回転物体の回転中心位置検出方法

Publications (2)

Publication Number Publication Date
JPS58167907A true JPS58167907A (ja) 1983-10-04
JPS6334402B2 JPS6334402B2 (enrdf_load_stackoverflow) 1988-07-11

Family

ID=12890900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57051581A Granted JPS58167907A (ja) 1981-12-17 1982-03-30 回転物体の回転中心位置検出方法

Country Status (1)

Country Link
JP (1) JPS58167907A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60218123A (ja) * 1984-04-13 1985-10-31 Mitsubishi Electric Corp レ−ザビ−ムの位置決め装置
JPS61159104A (ja) * 1984-12-29 1986-07-18 Omron Tateisi Electronics Co 回転中心検出装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6449534A (en) * 1987-08-20 1989-02-27 Topcon Corp Air-flow blow device for non-contact type tonometer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60218123A (ja) * 1984-04-13 1985-10-31 Mitsubishi Electric Corp レ−ザビ−ムの位置決め装置
JPS61159104A (ja) * 1984-12-29 1986-07-18 Omron Tateisi Electronics Co 回転中心検出装置

Also Published As

Publication number Publication date
JPS6334402B2 (enrdf_load_stackoverflow) 1988-07-11

Similar Documents

Publication Publication Date Title
JP4672255B2 (ja) ワークピース表面を研磨する方法および装置
CN103090786B (zh) 用于用干涉测量法测量物体的装置和方法
JPS58167907A (ja) 回転物体の回転中心位置検出方法
JPH0256604B2 (enrdf_load_stackoverflow)
US7471398B2 (en) Method for measuring contour variations
JPS58105006A (ja) 回転物体の回転中心位置検出方法
US4529310A (en) Device for detection of center of rotation of rotating object
JPS60104206A (ja) 光学測定装置
JP3421309B2 (ja) 表面形状測定方法及び表面形状測定器
JP2753545B2 (ja) 形状測定システム
JP2004279075A (ja) レンズの偏芯測定方法及び測定装置
JPS6117908A (ja) ３次元形状測定装置
JPS6117907A (ja) ３次元形状測定装置
JPS59211810A (ja) 光ヘテロダイン干渉法による微小角度測定方法
JP3495918B2 (ja) 光学部品の偏心測定方法および偏心測定装置
SU1578462A1 (ru) Способ измерени малых угловых поворотов объекта
JPH0469508A (ja) 非接触式形状測定装置及び形状測定法
JPS60211306A (ja) 縞走査シエアリング干渉測定装置における光学系調整方法
JPH0470539A (ja) 色収差測定方法及び測定装置
JPS59162405A (ja) 光学式機械量測定装置
JPH11166881A (ja) 偏心測定方法及び偏心測定装置
JPS63204182A (ja) レ−ザドツプラ速度測定方法および装置
JPS59225308A (ja) 微小間隔測定装置
JPH0714334A (ja) ハードディスク用ヘッドの浮上量測定装置
JP2002310620A (ja) レンズ中肉厚測定装置及びレンズ中肉厚測定方法