JPS58164239A - 誘電体分離基板及びその製造方法 - Google Patents
誘電体分離基板及びその製造方法Info
- Publication number
- JPS58164239A JPS58164239A JP57046900A JP4690082A JPS58164239A JP S58164239 A JPS58164239 A JP S58164239A JP 57046900 A JP57046900 A JP 57046900A JP 4690082 A JP4690082 A JP 4690082A JP S58164239 A JPS58164239 A JP S58164239A
- Authority
- JP
- Japan
- Prior art keywords
- conductivity type
- single crystal
- region
- main surface
- crystal island
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H10W10/019—
-
- H10W10/10—
Landscapes
- Bipolar Transistors (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57046900A JPS58164239A (ja) | 1982-03-24 | 1982-03-24 | 誘電体分離基板及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57046900A JPS58164239A (ja) | 1982-03-24 | 1982-03-24 | 誘電体分離基板及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58164239A true JPS58164239A (ja) | 1983-09-29 |
| JPH0421343B2 JPH0421343B2 (enExample) | 1992-04-09 |
Family
ID=12760235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57046900A Granted JPS58164239A (ja) | 1982-03-24 | 1982-03-24 | 誘電体分離基板及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58164239A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62166540A (ja) * | 1986-01-20 | 1987-07-23 | Nec Corp | 誘電体分離型半導体装置及びその製造方法 |
| JPH02112096A (ja) * | 1988-10-21 | 1990-04-24 | Matsushita Electric Works Ltd | Ic化された感知器 |
| US4948742A (en) * | 1987-09-08 | 1990-08-14 | Mitsubishi Denki Kabushiki Kaisha | Method of manufacturing a semiconductor device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5075780A (enExample) * | 1973-11-07 | 1975-06-21 | ||
| JPS5326687A (en) * | 1976-08-25 | 1978-03-11 | Nec Corp | Manu facture of integration-type thyristor matrix |
-
1982
- 1982-03-24 JP JP57046900A patent/JPS58164239A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5075780A (enExample) * | 1973-11-07 | 1975-06-21 | ||
| JPS5326687A (en) * | 1976-08-25 | 1978-03-11 | Nec Corp | Manu facture of integration-type thyristor matrix |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62166540A (ja) * | 1986-01-20 | 1987-07-23 | Nec Corp | 誘電体分離型半導体装置及びその製造方法 |
| US4948742A (en) * | 1987-09-08 | 1990-08-14 | Mitsubishi Denki Kabushiki Kaisha | Method of manufacturing a semiconductor device |
| JPH02112096A (ja) * | 1988-10-21 | 1990-04-24 | Matsushita Electric Works Ltd | Ic化された感知器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0421343B2 (enExample) | 1992-04-09 |
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