JPS58161320A - 規則性パタ−ンの欠陥検査装置 - Google Patents
規則性パタ−ンの欠陥検査装置Info
- Publication number
- JPS58161320A JPS58161320A JP57042541A JP4254182A JPS58161320A JP S58161320 A JPS58161320 A JP S58161320A JP 57042541 A JP57042541 A JP 57042541A JP 4254182 A JP4254182 A JP 4254182A JP S58161320 A JPS58161320 A JP S58161320A
- Authority
- JP
- Japan
- Prior art keywords
- defect
- pattern
- signal
- movement
- edge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57042541A JPS58161320A (ja) | 1982-03-19 | 1982-03-19 | 規則性パタ−ンの欠陥検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57042541A JPS58161320A (ja) | 1982-03-19 | 1982-03-19 | 規則性パタ−ンの欠陥検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58161320A true JPS58161320A (ja) | 1983-09-24 |
| JPH0211841B2 JPH0211841B2 (enrdf_load_stackoverflow) | 1990-03-16 |
Family
ID=12638920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57042541A Granted JPS58161320A (ja) | 1982-03-19 | 1982-03-19 | 規則性パタ−ンの欠陥検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58161320A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06212629A (ja) * | 1991-08-30 | 1994-08-02 | Samsung Construction Co Ltd | 地中アンカーとロックボルトの施工方法及びその組立体 |
-
1982
- 1982-03-19 JP JP57042541A patent/JPS58161320A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0211841B2 (enrdf_load_stackoverflow) | 1990-03-16 |
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