JPH0480427B2 - - Google Patents

Info

Publication number
JPH0480427B2
JPH0480427B2 JP57015463A JP1546382A JPH0480427B2 JP H0480427 B2 JPH0480427 B2 JP H0480427B2 JP 57015463 A JP57015463 A JP 57015463A JP 1546382 A JP1546382 A JP 1546382A JP H0480427 B2 JPH0480427 B2 JP H0480427B2
Authority
JP
Japan
Prior art keywords
circuit
pattern
signal
bits
bit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57015463A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58134429A (ja
Inventor
Kazunari Hata
Norio Fujii
Tooru Azuma
Kaoru Kikuchi
Junji Hazama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP57015463A priority Critical patent/JPS58134429A/ja
Priority to US06/462,515 priority patent/US4589139A/en
Publication of JPS58134429A publication Critical patent/JPS58134429A/ja
Publication of JPH0480427B2 publication Critical patent/JPH0480427B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/0006—Industrial image inspection using a design-rule based approach
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30164—Workpiece; Machine component

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Quality & Reliability (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Image Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Image Analysis (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57015463A 1982-02-04 1982-02-04 パタ−ン欠陥検査装置 Granted JPS58134429A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP57015463A JPS58134429A (ja) 1982-02-04 1982-02-04 パタ−ン欠陥検査装置
US06/462,515 US4589139A (en) 1982-02-04 1983-01-31 Apparatus for detecting defects in pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57015463A JPS58134429A (ja) 1982-02-04 1982-02-04 パタ−ン欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS58134429A JPS58134429A (ja) 1983-08-10
JPH0480427B2 true JPH0480427B2 (enrdf_load_stackoverflow) 1992-12-18

Family

ID=11889484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57015463A Granted JPS58134429A (ja) 1982-02-04 1982-02-04 パタ−ン欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS58134429A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60223124A (ja) * 1984-04-18 1985-11-07 Mitsubishi Electric Corp パタ−ン検査装置
KR102735596B1 (ko) * 2019-01-30 2024-11-28 삼성디스플레이 주식회사 접착 결함 검출 장치 및 이를 이용한 검출 방법

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5919387B2 (ja) * 1976-12-29 1984-05-04 富士通株式会社 パタ−ン検査方法
JPS5427370A (en) * 1977-08-02 1979-03-01 Olympus Optical Co Ltd Edge processing method in pattern test
JPS54102837A (en) * 1978-01-28 1979-08-13 Nippon Telegr & Teleph Corp <Ntt> Pattern check system
JPS5914782B2 (ja) * 1979-12-24 1984-04-06 日本電信電話株式会社 ２値パタ−ンの数値化処理方式

Also Published As

Publication number Publication date
JPS58134429A (ja) 1983-08-10

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