JPS5427370A - Edge processing method in pattern test - Google Patents
Edge processing method in pattern testInfo
- Publication number
- JPS5427370A JPS5427370A JP9215777A JP9215777A JPS5427370A JP S5427370 A JPS5427370 A JP S5427370A JP 9215777 A JP9215777 A JP 9215777A JP 9215777 A JP9215777 A JP 9215777A JP S5427370 A JPS5427370 A JP S5427370A
- Authority
- JP
- Japan
- Prior art keywords
- processing method
- edge processing
- pattern test
- pattern
- test
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
PURPOSE: To reduce the capacity of the error position memory and thus to shorten the test time by eliminating the errors which are detected mistakenly at the pattern edge part when the pattern is tested and drawing out only the desired error information.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9215777A JPS5427370A (en) | 1977-08-02 | 1977-08-02 | Edge processing method in pattern test |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9215777A JPS5427370A (en) | 1977-08-02 | 1977-08-02 | Edge processing method in pattern test |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5427370A true JPS5427370A (en) | 1979-03-01 |
JPS614174B2 JPS614174B2 (en) | 1986-02-07 |
Family
ID=14046579
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9215777A Granted JPS5427370A (en) | 1977-08-02 | 1977-08-02 | Edge processing method in pattern test |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5427370A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57188823A (en) * | 1981-05-15 | 1982-11-19 | Nippon Kogaku Kk <Nikon> | Inspecting device for pattern |
JPS58134429A (en) * | 1982-02-04 | 1983-08-10 | Nippon Kogaku Kk <Nikon> | Testing device for defect of pattern |
JPS6461338A (en) * | 1987-08-31 | 1989-03-08 | Kuraray Co | Cement admixture |
-
1977
- 1977-08-02 JP JP9215777A patent/JPS5427370A/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57188823A (en) * | 1981-05-15 | 1982-11-19 | Nippon Kogaku Kk <Nikon> | Inspecting device for pattern |
JPH02853B2 (en) * | 1981-05-15 | 1990-01-09 | Nippon Kogaku Kk | |
JPS58134429A (en) * | 1982-02-04 | 1983-08-10 | Nippon Kogaku Kk <Nikon> | Testing device for defect of pattern |
JPH0480427B2 (en) * | 1982-02-04 | 1992-12-18 | Nippon Kogaku Kk | |
JPS6461338A (en) * | 1987-08-31 | 1989-03-08 | Kuraray Co | Cement admixture |
Also Published As
Publication number | Publication date |
---|---|
JPS614174B2 (en) | 1986-02-07 |
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