JPS5427370A - Edge processing method in pattern test - Google Patents

Edge processing method in pattern test

Info

Publication number
JPS5427370A
JPS5427370A JP9215777A JP9215777A JPS5427370A JP S5427370 A JPS5427370 A JP S5427370A JP 9215777 A JP9215777 A JP 9215777A JP 9215777 A JP9215777 A JP 9215777A JP S5427370 A JPS5427370 A JP S5427370A
Authority
JP
Japan
Prior art keywords
processing method
edge processing
pattern test
pattern
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9215777A
Other languages
Japanese (ja)
Other versions
JPS614174B2 (en
Inventor
Masaharu Sakamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP9215777A priority Critical patent/JPS5427370A/en
Publication of JPS5427370A publication Critical patent/JPS5427370A/en
Publication of JPS614174B2 publication Critical patent/JPS614174B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE: To reduce the capacity of the error position memory and thus to shorten the test time by eliminating the errors which are detected mistakenly at the pattern edge part when the pattern is tested and drawing out only the desired error information.
COPYRIGHT: (C)1979,JPO&Japio
JP9215777A 1977-08-02 1977-08-02 Edge processing method in pattern test Granted JPS5427370A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9215777A JPS5427370A (en) 1977-08-02 1977-08-02 Edge processing method in pattern test

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9215777A JPS5427370A (en) 1977-08-02 1977-08-02 Edge processing method in pattern test

Publications (2)

Publication Number Publication Date
JPS5427370A true JPS5427370A (en) 1979-03-01
JPS614174B2 JPS614174B2 (en) 1986-02-07

Family

ID=14046579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9215777A Granted JPS5427370A (en) 1977-08-02 1977-08-02 Edge processing method in pattern test

Country Status (1)

Country Link
JP (1) JPS5427370A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188823A (en) * 1981-05-15 1982-11-19 Nippon Kogaku Kk <Nikon> Inspecting device for pattern
JPS58134429A (en) * 1982-02-04 1983-08-10 Nippon Kogaku Kk <Nikon> Testing device for defect of pattern
JPS6461338A (en) * 1987-08-31 1989-03-08 Kuraray Co Cement admixture

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188823A (en) * 1981-05-15 1982-11-19 Nippon Kogaku Kk <Nikon> Inspecting device for pattern
JPH02853B2 (en) * 1981-05-15 1990-01-09 Nippon Kogaku Kk
JPS58134429A (en) * 1982-02-04 1983-08-10 Nippon Kogaku Kk <Nikon> Testing device for defect of pattern
JPH0480427B2 (en) * 1982-02-04 1992-12-18 Nippon Kogaku Kk
JPS6461338A (en) * 1987-08-31 1989-03-08 Kuraray Co Cement admixture

Also Published As

Publication number Publication date
JPS614174B2 (en) 1986-02-07

Similar Documents

Publication Publication Date Title
JPS52129334A (en) Memor
JPS52144895A (en) Control method for cam machining apparatus
JPS5427370A (en) Edge processing method in pattern test
JPS5245835A (en) Detection method of memory error occurrence address
JPS5370635A (en) Information memory processor
JPS51147260A (en) Inspecting method of resist pattern
JPS5259537A (en) Data processor
JPS5316544A (en) Recording method of program processing time
JPS52137984A (en) Drawing apparatus
JPS5350813A (en) Information memory device
JPS5216177A (en) Probe card
JPS5210767A (en) Clock tester
JPS5249899A (en) Magnetic ticket processing method
JPS5231625A (en) Memory test method
JPS5355917A (en) Buffer memory unit
JPS5442932A (en) Automatic testing machine
JPS51142920A (en) Error correction system checking method
JPS5319819A (en) Control error detection system in magnetic recording
JPS5343451A (en) Data analyzer
JPS52124814A (en) Detection unit of minute pattern
JPS5275239A (en) Magnetic card read and write unit
JPS51111014A (en) Error detecting circuit
JPS5367086A (en) Logic sequence system
JPS5342632A (en) Stability continous test method of bubble information
JPS5413229A (en) Parity inspection system