JPH0224322B2 - - Google Patents

Info

Publication number
JPH0224322B2
JPH0224322B2 JP11781681A JP11781681A JPH0224322B2 JP H0224322 B2 JPH0224322 B2 JP H0224322B2 JP 11781681 A JP11781681 A JP 11781681A JP 11781681 A JP11781681 A JP 11781681A JP H0224322 B2 JPH0224322 B2 JP H0224322B2
Authority
JP
Japan
Prior art keywords
pattern
circuit
corner
information
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11781681A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5821107A (ja
Inventor
Tooru Azuma
Junji Hazama
Atsushi Kawahara
Kazunari Hata
Norio Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP56117816A priority Critical patent/JPS5821107A/ja
Priority to US06/400,681 priority patent/US4479145A/en
Publication of JPS5821107A publication Critical patent/JPS5821107A/ja
Publication of JPH0224322B2 publication Critical patent/JPH0224322B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30164—Workpiece; Machine component

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Theoretical Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Quality & Reliability (AREA)
  • Analytical Chemistry (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP56117816A 1981-07-29 1981-07-29 パタ−ン検査装置 Granted JPS5821107A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP56117816A JPS5821107A (ja) 1981-07-29 1981-07-29 パタ−ン検査装置
US06/400,681 US4479145A (en) 1981-07-29 1982-07-22 Apparatus for detecting the defect of pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56117816A JPS5821107A (ja) 1981-07-29 1981-07-29 パタ−ン検査装置

Publications (2)

Publication Number Publication Date
JPS5821107A JPS5821107A (ja) 1983-02-07
JPH0224322B2 true JPH0224322B2 (enrdf_load_stackoverflow) 1990-05-29

Family

ID=14720960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56117816A Granted JPS5821107A (ja) 1981-07-29 1981-07-29 パタ−ン検査装置

Country Status (1)

Country Link
JP (1) JPS5821107A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0675038B2 (ja) * 1983-03-11 1994-09-21 ケイエルエイ・インストラメンツ・コ−ポレ−シヨン 光学検査装置
JPS60123709A (ja) * 1983-12-09 1985-07-02 Hitachi Ltd パタ−ン検査装置
JP4768489B2 (ja) * 2006-03-29 2011-09-07 株式会社東芝 パターン検査方法及びマスクの製造方法
KR101251372B1 (ko) * 2008-10-13 2013-04-05 주식회사 고영테크놀러지 3차원형상 측정방법

Also Published As

Publication number Publication date
JPS5821107A (ja) 1983-02-07

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