JPS5821107A - パタ−ン検査装置 - Google Patents

パタ−ン検査装置

Info

Publication number
JPS5821107A
JPS5821107A JP56117816A JP11781681A JPS5821107A JP S5821107 A JPS5821107 A JP S5821107A JP 56117816 A JP56117816 A JP 56117816A JP 11781681 A JP11781681 A JP 11781681A JP S5821107 A JPS5821107 A JP S5821107A
Authority
JP
Japan
Prior art keywords
pattern
circuit
corner
information
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56117816A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0224322B2 (enrdf_load_stackoverflow
Inventor
Toru Azuma
徹 東
Junji Hazama
間　潤治
Atsushi Kawahara
河原　厚
Kazunari Hata
一成 秦
Norio Fujii
藤井　憲男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP56117816A priority Critical patent/JPS5821107A/ja
Priority to US06/400,681 priority patent/US4479145A/en
Publication of JPS5821107A publication Critical patent/JPS5821107A/ja
Publication of JPH0224322B2 publication Critical patent/JPH0224322B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30164—Workpiece; Machine component

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Theoretical Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Quality & Reliability (AREA)
  • Analytical Chemistry (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP56117816A 1981-07-29 1981-07-29 パタ−ン検査装置 Granted JPS5821107A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP56117816A JPS5821107A (ja) 1981-07-29 1981-07-29 パタ−ン検査装置
US06/400,681 US4479145A (en) 1981-07-29 1982-07-22 Apparatus for detecting the defect of pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56117816A JPS5821107A (ja) 1981-07-29 1981-07-29 パタ−ン検査装置

Publications (2)

Publication Number Publication Date
JPS5821107A true JPS5821107A (ja) 1983-02-07
JPH0224322B2 JPH0224322B2 (enrdf_load_stackoverflow) 1990-05-29

Family

ID=14720960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56117816A Granted JPS5821107A (ja) 1981-07-29 1981-07-29 パタ−ン検査装置

Country Status (1)

Country Link
JP (1) JPS5821107A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59173736A (ja) * 1983-03-11 1984-10-01 ケイエルエイ・インストラメンツ・コ−ポレ−シヨン 光学検査装置
JPS60123709A (ja) * 1983-12-09 1985-07-02 Hitachi Ltd パタ−ン検査装置
JP2007266391A (ja) * 2006-03-29 2007-10-11 Toshiba Corp パターン検査方法及びマスクの製造方法
JP2010091569A (ja) * 2008-10-13 2010-04-22 Koh Young Technology Inc ３次元形状の測定方法及び測定装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59173736A (ja) * 1983-03-11 1984-10-01 ケイエルエイ・インストラメンツ・コ−ポレ−シヨン 光学検査装置
JPS60123709A (ja) * 1983-12-09 1985-07-02 Hitachi Ltd パタ−ン検査装置
JP2007266391A (ja) * 2006-03-29 2007-10-11 Toshiba Corp パターン検査方法及びマスクの製造方法
JP2010091569A (ja) * 2008-10-13 2010-04-22 Koh Young Technology Inc ３次元形状の測定方法及び測定装置
US9101055B2 (en) 2008-10-13 2015-08-04 Koh Young Technology Inc. Method of measuring a three-dimensional shape
JP2015194500A (ja) * 2008-10-13 2015-11-05 コー・ヤング・テクノロジー・インコーポレーテッド ３次元形状の測定方法及び測定装置

Also Published As

Publication number Publication date
JPH0224322B2 (enrdf_load_stackoverflow) 1990-05-29

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